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Method for improving temperature stability of metal mask in OLED evaporation process

A metal mask and stability technology, applied in the field of OLED evaporation process, can solve the problems of unstable evaporation process, deformation of metal mask and glass, etc., and achieve the effect of avoiding deformation and stable process

Inactive Publication Date: 2014-11-19
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

During this period of temperature rise, the size of the metal mask will still change accordingly, causing deformation of the metal mask and glass due to thermal expansion, resulting in instability of the evaporation process

Method used

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  • Method for improving temperature stability of metal mask in OLED evaporation process
  • Method for improving temperature stability of metal mask in OLED evaporation process
  • Method for improving temperature stability of metal mask in OLED evaporation process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Cooperate with reference image 3 As shown, before the metal mask 20 is introduced into the evaporation chamber 40, it is stored in the temporary storage chamber 30 at room temperature. The metal mask 20 is preheated inside, so that the metal mask 20 has reached the equilibrium temperature that will be reached during the continuous evaporation process before the metal mask 20 is introduced into the evaporation chamber 40, ensuring that the metal mask 20 is introduced into the evaporation chamber After the body 40, the size is not affected by the temperature change, which avoids the deformation of the metal mask 20 and the glass substrate in the evaporation chamber 40 due to thermal expansion, thereby achieving the stability of the process.

[0028] Wherein, a resistance heating wire 210 or a water pipe 220 is buried around the cavity of the temporary storage chamber 30, and the temporary storage is realized by heating the resistance heating wire 210 or heating the water...

Embodiment 2

[0031] Cooperate with reference Figure 4 As shown, before the metal mask 20 is introduced into the evaporation chamber 40, it is stored in the temporary storage chamber 30 at room temperature. The metal mask 20 is preheated inside, so that the metal mask 20 has reached the equilibrium temperature that will be reached during the continuous evaporation process before the metal mask 20 is introduced into the evaporation chamber 40, ensuring that the metal mask 20 is introduced into the evaporation chamber After the body 40, the size is not affected by the temperature change, which avoids the deformation of the metal mask 20 and the glass substrate in the evaporation chamber 40 due to thermal expansion, thereby achieving the stability of the process.

[0032] Wherein, a carrying platform 230 for placing the metal mask 20 is provided in the temporary storage cavity 30, and a resistive heating line 210 or a water pipe 220 is embedded in the carrying platform 230, and the resistive ...

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Abstract

The invention discloses a method for improving temperature stability of a metal mask in an OLED evaporation process. The method comprises the following steps: providing an evaporation chamber and a glass substrate, and heating the glass substrate located in the evaporation chamber until the temperature of the glass substrate reaches an equilibrium temperature; providing a metal mask and preheating the metal mask until the temperature of the metal mask reaches the equilibrium temperature; and conveying the preheated metal mask onto the glass substrate in the evaporation chamber for evaporation. The method is characterized in that the metal mask is preheated before being conveyed into the evaporation chamber, and therefore, the temperature of the metal mask reaches the equilibrium temperature which is required in the continuous evaporation manufacturing process before the metal mask is conveyed into the evaporation chamber. As a result, the metal mask can be prevented from being changed in dimension due to the temperature change at the very start when the metal mask is conveyed into the evaporation chamber, and the metal mask and the glass substrate are protected against deformation due to thermal expansion, and furthermore, the stability of the manufacturing process is ensured.

Description

technical field [0001] The invention relates to an OLED evaporation process, in particular to a method for improving the temperature stability of a metal mask in the OLED evaporation process. Background technique [0002] Traditional OLED evaporation coatings use metal masks or FMMs (high-precision metal masks) to define the coating area. The size change of the metal mask will affect the coating accuracy. If the size changes too much, it will affect the quality of the coating, resulting in mixed colors. Yield decreases. One of the factors affecting the size change of the metal mask is thermal expansion, because the organic material is evaporated, and the heat will pass through the heated organic material or transfer the heat of the evaporation source to the metal mask or glass in the form of thermal radiation. On the substrate, the metal mask and the glass substrate are deformed due to thermal expansion. This deformation has an impact on the stability of the OLED manufactu...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24C23C14/54
Inventor 康嘉滨苏志玮
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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