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Aspheric surface non-contact type measuring system and method for deflection workpieces

A non-contact, measurement system technology, applied in measurement devices, instruments, optical devices, etc., can solve problems such as difficulty in aspherical surface detection, and achieve the effect of high measurement accuracy

Active Publication Date: 2014-11-26
NANJING UNIV OF SCI & TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0006] Aiming at the defects in the prior art, the present invention provides a non-contact measurement system and method for deflecting the aspheric surface of the workpiece, aiming at solving the difficult problem of aspheric surface detection, with high measurement accuracy, no need for reference surface shape during measurement, and no damage component surface

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  • Aspheric surface non-contact type measuring system and method for deflection workpieces
  • Aspheric surface non-contact type measuring system and method for deflection workpieces
  • Aspheric surface non-contact type measuring system and method for deflection workpieces

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Embodiment Construction

[0030] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0031] to combine figure 1 , according to a preferred embodiment of the present invention, a non-contact measurement system for deflecting the aspheric surface of a workpiece, which includes: a non-contact optical profiler probe 1, a profiler lifting adjustment mechanism 2, a precision three-dimensional translation table 4, a digital Inclinometer 5, two-dimensional tilt table 6, base 7 and a computer system 8, such as figure 1 shown, where:

[0032] The non-contact optical profiler probe 1 is fixed on the profiler lifting adjustment mechanism 2;

[0033] The precision three-dimensional translation platform 4 is fixed on the two-dimensional tilting platform 6, and is used to realize the bearing of the measured object 3 and the lateral movement and positioning of the measured object 3;

[0034] Th...

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Abstract

The invention provides an aspheric surface non-contact type measuring system for deflection workpieces. The aspheric surface non-contact type measuring system comprises a non-contact type optical profilometer probe, a profilometer lifting and adjusting mechanism, a precise three-dimensional displacement table, a digital display inclinometer, a two-dimensional deflection table, a base and a computer system. The non-contact type optical profilometer probe is fixed on the profilometer lifting and adjusting mechanism. The precise three-dimensional displacement table is fixed on the two-dimensional deflection table and is used for bearing, horizontal moving and positioning of a measured piece. The digital display inclinometer is fixed on the two-dimensional deflection table and is used for measuring the deflection angle of the two-dimensional deflection table. The two-dimensional deflection table is fixed on the base and is used for achieving deflection of the measured piece through deflection. The computer system is in data connection with the non-contact type optical profilometer probe, the precise three-dimensional displacement table and the digital display inclinometer to receive the face data of measuring points and the horizontal displacement data and the deflection angle of a measured piece, and the face data, the horizontal displacement data and the deflection angle are processed to achieve aspheric surface face recovery. The invention further relates to an aspheric surface non-contact type measuring method for the deflection workpieces.

Description

technical field [0001] The invention relates to the field of optical interference precision measurement, in particular to a non-contact measurement system and method for deflecting the aspheric surface of a workpiece. Background technique [0002] Aspherical optical elements are optical elements whose surface shape deviates from a spherical surface. Compared with traditional planar and spherical optical elements, they have greater degrees of freedom and flexibility, and have various shapes, so they can effectively correct various aberrations, improve image quality, and reduce The number of optical components required by the system, reducing the size of the system, reducing the weight of the system, etc. With the development of modern science and technology, optical aspheric surfaces have become more and more important and widely used in key technical fields such as space cameras, large telescopes and infrared guidance, as well as optoelectronic products due to their excellen...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 陈磊郑权周舒韩志刚
Owner NANJING UNIV OF SCI & TECH
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