Testing apparatus and relative method
A technology of testing equipment and testing area, which is applied in printed circuit testing, electronic circuit testing, single semiconductor device testing, etc., and can solve problems such as negative test results, inability to hold the substrate, and inability to stably contact the needle.
Active Publication Date: 2014-12-03
APPLIED MATERIALS INC
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- Description
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- Application Information
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Problems solved by technology
[0010] This solution, while avoiding unwanted destruction of the substrate during testing, does not allow the substrate to remain in a stable and locked position permanently during testing
This can result in one or more pins not making stable contact with the corresponding contact area of the substrate, thus producing a negative test result for a substrate that is actually non-defective
Method used
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Embodiment Construction
[0053] With reference to the accompanying drawings, it can be seen that the test apparatus 10 of the present invention can be used in a factory to produce a "back side contact" type substrate 150 or wafer (preferably, but not limited to this type) of solar cells. , wherein all the metal contacts for extracting and converting electric energy are arranged on one side of the substrate 150 . The substrate 150 has a substantially flat square or rectangular structure.
[0054] figure 1 Is a schematic isometric view of a system 100 for processing a substrate 150 in connection with one embodiment of the present invention. In one embodiment, the system 100 generally includes two infeed conveyors 111 , an actuation assembly 140 , a plurality of processing suites 131 , a plurality of processing heads 102 , two outfeed conveyors 112 , and a system controller 101 . The infeed conveyors 111 are configured for parallel processing such that they each receive unprocessed substrates 150 from ...
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Abstract
Embodiments of the invention may provide a testing apparatus that is used to test solar cells or other electronic devices. The testing apparatus may comprise a substantially flat support that is configured to support a substrate or other device that is to be electrically tested and a plurality of testing probes. The support comprises a plurality of through holes, each suitable for the insertion of a corresponding testing probe, to allow each probe to make contact with a testing area formed on the substrate. The testing apparatus may comprise a suction device that is associated or associable with the support, and is able to exert a holding force on the substrate that counteracts the thrusting force exerted by the testing probes.
Description
[0001] This application is a divisional application of PCT International Application No. PCT / EP2010 / 062831, International Application Date September 2, 2010, Chinese National Application No. 201080039570.1, entitled "Testing Equipment and Related Methods". technical field [0002] The present invention relates to a test equipment and its related method used in electronic device manufacturing factory to perform electrical control or test on the manufactured device. [0003] In particular, the testing device of the invention is used for electrical control of substrates or wafers of solar cells to check for possible defects in the electrical patterns produced therein. Background technique [0004] Test equipment for testing electronic devices, such as substrates or wafers for solar cells, is known and is generally located at the end of the production line of a plant where these electronic devices are produced. Here and in the following it refers in particular to substrates or w...
Claims
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IPC IPC(8): G01R31/26G01R31/28H01L31/18H01L21/677
CPCG01R31/2808H02S50/10H01L31/1876H01L21/67736G01R31/2893Y02E10/50Y02P70/50G01R31/2889
Inventor 迈克勒·瓦佐勒
Owner APPLIED MATERIALS INC