Hemispherical resonant micro gyroscope supported up and down

Abstract

The invention provides a vertical-through-supported hemispherical resonant microgyroscope. The vertical-through-supported hemispherical resonant microgyroscope comprises a cuboidal base body, a hemispherical resonator, a supporting column, a cavity, eight electrodes, a top supporting body and a top supporting column, wherein the supporting column is located at the center of the base body, and the eight electrodes are symmetrically distributed at the periphery of the base body; the hemispherical resonator is fixed by the supporting column and the top supporting body and is located in the cavity; the cuboidal base body and the top supporting body are connected together through bonding; the top supporting column is located at the center of the top supporting body. The vertical-through-supported hemispherical resonant microgyroscope has the characteristics that the process is simple, the performance is excellent, the reliability is high, the vacuum encapsulation is facilitated, and the like.

Description

technical field [0001] The invention relates to a hemispherical resonant gyroscope in the field of micro-electromechanical technology, in particular to a hemispherical resonant gyroscope supported vertically and vertically. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliabil...

AI Technical Summary

Problems solved by technology

[0004] This technology has the following disadvantages: the volume of the solid wave gyro cup-shaped resonator is too large, which limits its application in many conditions where the volume must be small; the piezoelectric electrodes of the cup-shaped vibrator chassis are bonded to the cup-shaped vibrator. There is a possibility of falling off under high-frequency vibration, and the reliability is not high; the processing technology of the gyroscope is relatively complicated, the processing cost is high, and it is not suitable for mass production; Large, the quality factor is difficult to improve; the gyro fixing method is unstable, and it is difficult to adapt to occasions that require high reliability

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