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Device for detecting focal points of electron beams on basis of characteristic spectral lines and method for operating device

A technology of focus detection and working method, which is applied in the field of material processing, can solve problems such as the difficulty of determining the focus position of electron beams directly, accurately and effectively, and achieve the effect of rapid control and positioning

Inactive Publication Date: 2014-12-24
HOHAI UNIV CHANGZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide an electron beam focus monitoring device based on characteristic spectral lines with simple structure, low cost and easy operation. This electron beam focus monitoring device solves the problem that it is difficult to directly, accurately and effectively determine the Technical Problems of Electron Beam Focus Position

Method used

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  • Device for detecting focal points of electron beams on basis of characteristic spectral lines and method for operating device
  • Device for detecting focal points of electron beams on basis of characteristic spectral lines and method for operating device
  • Device for detecting focal points of electron beams on basis of characteristic spectral lines and method for operating device

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Embodiment 1

[0030] figure 1 A schematic diagram showing the structure of the electron beam focus detection device

[0031] Such as figure 1 As shown, an electron beam focus detection device based on characteristic spectral lines includes: an electron beam focusing unit, a spectrum acquisition and control unit; wherein, the electron beam focusing unit includes: a focusing coil 2, and the focusing coil is suitable for passing through The focusing current controls the focus position of the electron beam, and the electron beam focusing unit is suitable for adjusting the focus position of the electron beam emitted at any height; The radiation intensity of the surface is used to detect the highest radiation intensity; and the focusing current of the electron beam focusing unit is adjusted according to the highest radiation intensity to determine the focus position at the current height.

[0032] Specifically, the spectrum acquisition and control unit includes: a neutral filter 4, a telephoto ...

Embodiment 2

[0034] figure 2 A flow chart of the working method of the electron beam focus detection device is shown.

[0035] Such as figure 2 As shown, the working method of the electron beam focus detection device on the basis of embodiment 1 comprises the following steps:

[0036] Step S100, constructing an electron beam focus database.

[0037] Step S200, adjusting the focus current according to the electron beam focus database.

[0038] Specifically, the radiation intensities on the workpiece surface corresponding to different input currents of the focusing coil in the electron beam focusing unit are collected step by step at different heights to obtain the focusing current corresponding to the characteristic spectral line with the highest radiation intensity at the corresponding height.

[0039] Each height Z i The method for obtaining the focusing current corresponding to the characteristic spectral line of the highest radiation intensity comprises the following steps:

[0040...

Embodiment 3

[0052] On the basis of embodiment 1 and embodiment 2, the specific implementation process of determining the focus position is as follows:

[0053] The device used in this embodiment is composed of electron beam welding machine, spectrometer, optical fiber, acquisition probe and computer. The schematic diagram of the spectrum acquisition system is as follows figure 1 shown.

[0054] The workpiece 3 adopts a tungsten metal plate of 100mm*100mm*10mm, and the acceleration voltage U a =60kV, electron beam current I a =10mA, initial working height Z 0 = 5mm, electron beam scanning adopts a simple linear scanning method, the scanning line length is 5mm, the scanning frequency is 500HZ, and the scanning time is 30s. The center of the spectrometer is aligned with the scanning line, and the focusing current I is changed once after scanning a straight line. f . The heat source generated on the processing surface of the workpiece is collected by the probe, enters the spectrometer thr...

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Abstract

The invention discloses a device for detecting focal points of electron beams on the basis of characteristic spectral lines and a method for operating the device. The device for detecting the focal points of the electron beams comprises an electron beam focusing unit and a spectrum acquisition and control unit. The electron beam focusing unit is applicable to adjusting the positions of the focal points of the electron beams which are emitted at an optional altitude; the spectrum acquisition and control unit is applicable to detecting the highest radiation intensity according to acquired radiation intensity of the surfaces of workpieces after the workpieces are bombarded by the electron beams. Focusing currents of the electron beam focusing unit can be adjusted by the aid of the highest radiation intensity, so that the positions of the focal points at the current altitude can be determined. The device for detecting the focal points of the electron beams on the basis of the characteristic spectral lines and the method for operating the device have the advantages that the focusing currents are determined according to the acquired highest radiation intensity, accordingly, the positions of the focal points at the current altitude can be determined, and the focal points of the electron beams can be quickly and accurately controlled and positioned by the aid of the device and the method.

Description

technical field [0001] The invention relates to the field of material processing, in particular to an electron beam focus detection device and working method based on characteristic element spectral lines. Background technique [0002] Electron beam processing uses high-energy electron beams as a heat source, and uses the thermal and chemical effects of electron beams to perform special processing on workpieces or materials. In the process of electron beam processing, the metal melting effect and processing quality are closely related to the processing parameters, physical parameters and geometric parameters of the electron beam. The processing parameters of the electron beam include acceleration voltage, beam current intensity, processing speed, electron beam focus position and quality, among which the electron beam focus position and quality are the most difficult to determine among all processing parameters, and have a particularly significant impact on the processing qua...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01T1/29
Inventor 陈云霞王小京
Owner HOHAI UNIV CHANGZHOU