A high-precision wavelength plate wafer processing technology
A wafer processing and high-precision technology, applied in the field of high-precision wavelength plate processing, can solve the problems of inconsistent wafer angles, low efficiency, and many unqualified products, and achieve the effects of easy guarantee of processing accuracy, good angle consistency, and high efficiency
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[0022] The technical solutions of the present invention will be described in further detail below through specific implementation methods.
[0023] Such as figure 2 As shown, the raw plate 1 is sliced at the design angle, the slice 2 is the position in the plate, the X, Y, and Z axes are the axial directions of the crystal plate, and the Z axis (optical axis) direction remains unchanged. , the angle between the short edge and the Z-axis (optical axis) is 45° as the design cutting angle, and the angle between the large surface of the wafer and the X-axis is also the design angle. First, the angle between the short edge and the Z-axis (optical axis) After processing, only the angle between the large surface of the wafer and the X-axis is controlled during cutting. The process is simple and easy, and the two angles meet the design angle requirements at the same time.
[0024] The implementation of the inventive production process comprises the following steps:
[0025] Step ...
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