Heater for crucible, crucible and evaporation source

A heating device and evaporation source technology, applied in vacuum evaporation plating, metal material coating process, coating, etc., can solve the problem of uneven heating of evaporation materials, so as to avoid uneven heating, improve uniformity, and improve purity Effect

Active Publication Date: 2015-02-18
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of this, the present invention provides a crucible heating device, a crucible and an evaporation source to solve the problem of uneven heating of evaporation materials by existing evaporation sources

Method used

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  • Heater for crucible, crucible and evaporation source
  • Heater for crucible, crucible and evaporation source
  • Heater for crucible, crucible and evaporation source

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Embodiment Construction

[0024] In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0025] In order to solve the problem of uneven heating of evaporation materials by existing evaporation sources, please refer to figure 2 , an embodiment of the present invention provides a heating device for a crucible, the heating device for a crucible includes a housing chamber 201 for housing a crucible, and a middle heater 202 disposed in the housing chamber 201, the middle heater 202 is used for Heating the evaporation material located in the middle of the crucible.

[0026] In this embodiment, the accommodating cavity 201 is surrounded by a bottom wall 203 and a side wall 204, an opening for installing a crucible is opened at a position opposite to the bottom wall, and the central heater 202 is arranged on the inside of the bottom wall 203 middl...

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PUM

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Abstract

The invention provides a heater for a crucible, a crucible and an evaporation source. The heater comprises a containing cavity for containing the crucible and a middle heating unit arranged in the contain cavity, wherein the middle heating unit is used for heating a vapor deposition material in the middle of the crucible. The side heating unit positioned on the periphery of the crucible can be utilized to heat the vapor deposition material on the periphery of the crucible, and the middle heating unit of the heater can be utilized to heat the vapor deposition material in the middle of the crucible, thereby avoiding the phenomenon of nonuniform heating of the middle material and peripheral material of the crucible, enhancing the vapor deposition temperature uniformity, and further enhancing the purity of the vapor deposition material and the properties of the vapor deposition film.

Description

technical field [0001] The invention relates to the field of evaporation technology, in particular to a heating device for a crucible, a crucible and an evaporation source. Background technique [0002] In OLED (Organic Light Emitting Diode) organic layer evaporation process, the organic material is usually placed in the evaporation source (source), the material is evaporated by heating the crucible, and the evaporated material is deposited on the substrate to form a film. [0003] Please refer to figure 1 , figure 1 It is a structural schematic diagram of an evaporation source in the prior art. The evaporation source mainly uses a cylindrical crucible 101 in the evaporation process, fills the evaporation material in the crucible 101, and uses a heater 102 arranged on the periphery of the crucible 101 to pair the crucible. 101 to heat the material in the crucible 101. In this structure, since the heater 102 is distributed on the periphery of the crucible 101, the problem t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/26
Inventor 马群闵天奎张朝波张毅
Owner BOE TECH GRP CO LTD
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