Fluoride shaft seal ultrathin rotating cathode end

Abstract

The invention relates to the field of vertical vacuum coating equipment, and in particular relates to a fluoride shaft seal ultrathin rotating cathode end. The cathode end comprises a base, wherein a first through hole is formed in the middle of the base; a liquid guide component which is connected to the base for guiding a liquid is arranged at the bottom of the base; a lower end cover for mounting a target barrel is arranged at the top of the base; a second through hole is formed in the middle of the lower end cover; the head end of the liquid guide component passes through the first through hole and the second through hole; a rotating component which sleeves the liquid guide component and is used for rotating is arranged between the lower end cover and the base; and a sealing component for sealing the rotating component is additionally arranged on the rotating component. By virtue of an ultrathin end structure that two bearings are matched with a synchronous wheel, the cathode end disclosed by the invention, not only can meet a requirement for using but also can save a cavity space; when manufacturing a vacuum equipment chamber, the cathode end can be used for saving use of materials and reducing equipment cost; meanwhile, the space of the vacuum chamber is compressed, which means increase of the pumping speed of a vacuum pump; and moreover, the cathode end, which is relatively thin, is suitable for updating of old vacuum equipment.

Description

technical field [0001] The invention relates to the field of vertical vacuum coating equipment, in particular to a fluoride shaft-sealed ultra-thin rotary cathode end. Background technique [0002] The current large-scale vacuum sputtering coating lines and stand-alone machines have begun to use rotating targets to replace the original planar cathodes. Compared with the old planar cathodes, the rotating cathodes have the following advantages: First, the target utilization rate can reach up to 90%, (planar Cathode 25%-35%), followed by a long trial period, which can prolong the production time, and the process stability is high. The height of the existing rotating cathode ends is generally higher than 200mm, and the lowest is more than 100mm. With such a height, the vacuum chamber can be designed higher to match the rotating cathode in the manufacture of new vacuum equipment rooms. , but this undoubtedly increases the cost of equipment. Especially when renovating the plane ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a fluoride shaft seal ultra-thin rotary cathode head to solve the existing vacuum equipment caused by the high height of the rotating cathode head in the prior art. The vacuum chamber needs to be designed higher to match the rotating cathode Matching, so as to increase the cost of equipment, and the problem that old equipment cannot match the rotating cathode end

Images