A split ultra-precision aerostatic single-axis turntable

Abstract

The invention relates to a split type ultra-precision aerostatic uniaxial rotary table which comprises a rotary table rotating shaft system, a drive shaft system and a work table-board and further comprises an aerostatic coupling, wherein the drive shaft system is connected with and drives the rotary table rotating shaft system through the aerostatic coupling; the work table-board is coaxially and fixedly connected with the rotary table rotating shaft system; a dense ball bearing is arranged in the drive shaft system, a shaft hole of the dense ball bearing is coaxially and fixedly connected with a drive motor; the aerostatic coupling is coaxially and fixedly connected with the dense ball bearing; a radial aerostatic bearing is arranged in the rotary table rotating shaft system and is coaxially and fixedly connected with the aerostatic coupling, and a thrust aerostatic bearing is coaxially arranged at the end surface of a shaft hole of the aerostatic bearing. With the adoption of the technical scheme, the split type ultra-precision aerostatic uniaxial rotary table has the benefits that the requirements for mounting precision are reduced, the assembly and adjustment process is simplified, the rotation precision and the plane positioning precision of the rotary table are high, and the aerostatic coupling has the automatic fine-tuning ability and is high in motion precision.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision transmission, and in particular relates to a split-type ultra-precision air static pressure single-axis turntable. Background technique [0002] In the field of ultra-precision transmission technology, the ultra-precision single-axis turntable is the core basic component in the field of precision machinery technology. It provides ultra-precision rotary motion benchmarks and angular displacement measurement benchmarks for various high-precision scientific instruments and equipment. One of the main technical indicators of system technical performance. The development process of the ultra-precision single-axis turntable covers many disciplines and technical fields such as mechanical engineering, electronic engineering, mechanism dynamics, material science, precision engineering design, precision ultra-precision technology, precision ultra-precision detection technology, etc. It is the compre...

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the problems existing in the prior art and provide a split-type ultra-precision aerostatic single-axis turntable. Complicated and other shortcomings, the rotary shaft system of the turntable and the drive shaft system are separately installed and adjusted, and then connected by an aerostatic coupling, which can realize the constant and accurate transmission of the driving force provided by the drive system to the rotary structure of the turntable, and the installation accuracy The requirements are reduced, and the assembly and adjustment process is greatly simplified. During the movement, the air film in the static pressure chamber can automatically adjust the position and attitude in a small amount, without lateral and radial swings, stable operation, and high system reliability.

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