A silicon-based microring polarization demultiplexer
A demultiplexer and microring technology, applied in the field of integrated optics, achieves high reliability, guaranteed reliability, and increased capacity
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[0030] The present invention will be further explained below in conjunction with the accompanying drawings.
[0031] like figure 1 figure 2 As shown, a silicon-based microring polarization demultiplexer includes a silicon substrate 6 and a cladding layer 7, and is characterized in that it includes an input waveguide 1, a transverse magnetic mode output waveguide 2, a transverse electric mode output waveguide 3, a mixed plasma Bulk waveguide 4 and microring 5;
[0032] The substrate 6 is located at the inner bottom of the cladding layer 7, and the hybrid plasma waveguide 4 and the microring 5 are located on the surface of the substrate 6;
[0033] The hybrid plasmonic waveguide 4 includes a dielectric waveguide 41, a filling layer 42 and a metal covering layer 43 in order from bottom to top; the dielectric waveguide 41 is close to the substrate 6;
[0034] The input waveguide 1 is connected to the transverse magnetic mode output waveguide 2 through the hybrid plasma wavegui...
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