Pixel array, manufacturing method thereof and display device

Abstract

The invention discloses a pixel array, a manufacturing method of the pixel array and a display device. The pixel array comprises a substrate, a first metal layer, a gate insulation layer, a semiconductor layer and a second metal layer, wherein the first metal layer, the gate insulation layer, the semiconductor layer and the second metal layer are sequentially formed on the substrate; a first region of data lines and a second region of a first pixel electrode are formed on the second metal layer; the first region includes at least two metal alloy layers, and the second region includes a single metal layer. The manufacturing method of the pixel array comprises the steps that two binary mask plates or a ternary mask plate is adopted, and the purposes that the first region of the second metal layer is of a metal alloy laminated structure and the second region is of a single-layer metal structure are achieved respectively. By the adoption of the pixel array, the manufacturing method of the pixel array and the display device, the pixel aperture ratio is maximized, storage capacitance can also be enhanced, and the stability of electrowetting display is achieved.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a pixel array, a manufacturing method, and a display device. Background technique [0002] Electrowetting (Electrowetting) display technology utilizes the natural forces inherent in the oil-water interface and the display technologies developed to exploit these forces. Specifically, the hydration of the hydrophobic surface of hydrophobic pigments such as dyed oil droplets is adjusted by applying a voltage, so that the dyed oil droplets spread evenly in the pixel when no voltage is applied, and are quickly pushed to the edge of the pixel after the voltage is applied, thereby realizing the color gray color. step display. [0003] As a reflective display technology, the light reflection efficiency of the electrowetting display exceeds 50%, so the brightness is twice as high as that of the general passive display device, and it can still be viewed under strong sunlight. At...

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Problems solved by technology

[0006] In the pixel array produced by the existing manufacturing process, in the pixel opening area, it is easy to cause a reverse chamfer between the contact hole area formed by the protective layer and the second metal layer below, causing the ITO transparent electrode to break at the reverse chamfer. The voltage of the pixel electrode cannot be normally transmitted to the ITO transparent electrode, which will reduce the storage capacitance of the pixel area and affect the stability of the electrowetting display device.

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