Adaptive annular polishing device for large-aperture non-spherical optical element

Abstract

The invention discloses an adaptive annular polishing device for a large-aperture non-spherical optical element. The adaptive annular polishing device comprises a main shaft, a workpiece motor, a workpiece disk, a trimming motor, a bracket, a trimming disk, a polishing die, an active grinding disk, a rotating motor and a base, wherein the main shaft and the rotating motor are both fixed on the base; the bracket is mounted on the main shaft through a bearing and connected with a rotating shaft of the rotating motor through a transmission system; the active grinding disk is mounted at the top of the main shaft; the polishing die is attached to the disk surface of the active grinding disk; the workpiece motor and the trimming motor are mounted on the bracket, and the rotating shaft is provided with the workpiece disk and the trimming disk respectively; a workpiece is mounted on the bottom surface of the workpiece disk. When the adaptive annular polishing device works, the processed surface of the workpiece and the bottom surface of the trimming disk are attached to the surface of the polishing die; the rotating motor drives the bracket to rotate; the workpiece motor and the trimming motor drive the workpiece and the trimming disk to rotate; the active grinding disk is adjusted, so that the polishing die can be changed in real time in the region in contact with the workpiece along with the surface shape of the workpiece and can realize planar deformation in the region in contact with the trimming disk to finish precise removal. Under the condition that a smaller quantity of moving shafts are used, precise processing of multiple types of element surfaces can be realized.

Description

technical field [0001] The invention relates to a polishing device, in particular to an adaptive annular polishing device for large-caliber aspheric optical elements, and belongs to the field of ultra-precision optical surface processing. technical background [0002] In the new century, the aerospace industry is developing rapidly, and the requirements for the precision and size of optical components are getting higher and higher, which brings great challenges to the advanced optical manufacturing industry and induces the emergence of various processing techniques. [0003] Ring polishing technology (Continuous Polishing) is mainly used in the ultra-precision machining of large-aperture planar optical components. Compared with other processing technologies, such as new high-precision polishing technologies such as magnetorheological polishing technology, ion beam polishing technology, and laser polishing technology, annular polishing technology is widely used in mass produc...

AI Technical Summary

Problems solved by technology

However, due to the stress disk polishing technology facing the system uncertainty model, it is often difficult to achieve the ideal surface shape control effect; in addition, the stress disk control system is too complicated, which also seriously restricts the stress disk polishing technology in the manufacture of aspheric optical components. Applications

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