Electromagnetic drive two-dimensional scanning micro mirror for laser scanning display

Abstract

The invention relates to an electromagnetic drive two-dimensional scanning micro mirror for laser scanning display. The micro mirror comprises a peripheral frame, an inner frame arranged in the peripheral frame, a vertical scanning twist beam connecting the peripheral frame and the inner frame, a micro reflecting mirror arranged in the inner frame and a pair of magnets. The peripheral frame is provided with a cantilever; the inner frame is connected to the cantilever of the peripheral frame through the vertical scanning twist beam; the cantilever is provided with a cantilever drive coil, the inner frame is provided with an inner frame drive coil, the magnets are arranged on two sides of the cantilever oppositely, and the magnetic induction lines produced by the magnets are perpendicular to the current directions of the cantilever drive coil and inner frame drive coil after powering. According to the micro mirror, the two groups of drive coils scanning in two directions are controlled independently, interference between two directions is reduced, large twisting angle can be acquired easily, the magnetic field utilization rate can be increased, and the drive scheme is simplified.

Description

technical field [0001] The invention relates to an electromagnetically driven two-dimensional scanning micromirror for laser scanning display. Background technique [0002] Laser scanning display technology refers to the use of movable mirrors to complete horizontal and vertical laser beam scanning to form scanning images on the screen. The scanning method is similar to traditional cathode ray tube (CRT, Cathode Ray Tube) TV, the difference is that Laser beams are used instead of electron beams. In order to realize high-resolution images, the scanning frequency (line frequency) of the micromirror in the horizontal direction needs to be above 20KHz, and the scanning frequency (frame frequency) in the vertical direction is generally 60Hz. Laser scanning display technology uses RGB three-color laser beams to form color images, and the obtained images have a wider color gamut and more realistic colors. Due to the characteristics of the laser, an undistorted image can be displa...

AI Technical Summary

Problems solved by technology

There is an electromagnetic coil directly on the mirror, which is easy to deform the mirror surface, and increases the area and mass of the mirror, so it is relatively difficult to achieve high-frequency torsion

A cantilever beam with an electromagnetic coil drives the mirror to twist around the X-axis. The cantilever beam is directly connected to the torsion universal joint, and is far away from the torsion axis. The structural constraints make it difficult for the mirror to obtain a large twist angle.

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