Electromagnetically driven two-dimensional scanning micromirrors for laser scanning display

Abstract

The invention relates to an electromagnetically driven two-dimensional scanning micromirror for laser scanning display, which comprises an outer frame, an inner frame arranged in the outer frame, a vertical scanning torsion beam connecting the outer frame and the inner frame, and an inner frame arranged The inner micro-mirror and a pair of magnets, the outer frame has a cantilever, the inner frame is connected to the cantilever of the outer frame through a vertical scanning torsion beam, the cantilever driving coil is arranged on the cantilever, and the inner frame driving coil is arranged on the inner frame. The magnets are respectively arranged on both sides of the cantilever. The magnetic field lines generated by the magnets are perpendicular to the current direction of the cantilever drive coil and the inner frame drive coil. The mutual interference between the two directions is reduced, and a large torsion angle can be easily obtained. In addition, the utilization rate of the magnetic field can be improved, and the driving scheme is simplified.

Description

Technical field [0001] The invention relates to an electromagnetically driven two-dimensional scanning micromirror for laser scanning display. Background technique [0002] Laser scanning display technology refers to the use of movable mirrors to complete horizontal and vertical laser beam scanning to form a scanned image on the screen. The scanning method is similar to that of a traditional cathode ray tube (CRT, Cathode Ray Tube) TV. The difference is The electron beam is replaced by a laser beam. In order to achieve high-resolution images, the scanning frequency (line frequency) of the micromirror in the horizontal direction needs to be above 20KHz, and the scanning frequency (frame frequency) in the vertical direction is generally 60Hz. Laser scanning display technology uses RGB three primary color laser beams to form color images, resulting in a wider color gamut and more vivid colors. Due to the characteristics of laser, undistorted images can be displayed on any shape su...

AI Technical Summary

Problems solved by technology

There is an electromagnetic coil directly on the mirror, which is easy to deform the mirror surface, and increases the area and mass of the mirror, so it is relatively difficult to achieve high-frequency torsion

A cantilever beam with an electromagnetic coil drives the mirror to twist around the X-axis. The cantilever beam is directly connected to the torsion universal joint, and is far away from the torsion axis. The structural constraints make it difficult for the mirror to obtain a large twist angle.

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