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Inspection apparatus and method for detecting properties of a material in a component sample

A technology for structural elements and inspection devices, which is applied to measurement devices, diode testing, and single semiconductor device testing, etc., can solve the problems of insufficient resolution, complex and expensive, and chemical methods limit accuracy, and achieve the effect of reducing costs.

Inactive Publication Date: 2015-05-06
SIM4TEC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Often, this method is also complex and expensive
[0006] To date, the concentration of dirt has been measured chemically in order to find out the influence of dirt on the electrical properties, but chemical methods have limited precision and especially insufficient resolution

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  • Inspection apparatus and method for detecting properties of a material in a component sample
  • Inspection apparatus and method for detecting properties of a material in a component sample

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Embodiment Construction

[0036] An embodiment of the invention, described below by way of example with reference to the control of electrical measurements and / or simulations, for filtering of measurement results and consistency testing of simulation results, shows important features of the invention. Details of the materials examined, the performance of the electrical measurements, the data processing or the design of the simulation functions are not described, as far as they are already known from the conventional art.

[0037] figure 1An embodiment of a testing device 100 according to the invention is schematically illustrated, in which embodiment a measuring device 10, a simulation and evaluation device 20, an output device 30, a control device 40, a filtering device 50, a consistency testing device Both 60 and input device 70 are arranged in a common housing 110 . In the illustrated embodiment, the testing device 100 forms a compact instrument, which is designed, for example, for laboratory use o...

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Abstract

An inspection apparatus (100) for detecting properties of at least one material contained in at least one component sample (1) comprises a measuring device (10), which can be used to record electrical measured values at the component sample (1), and a simulation and evaluation device (20) which is set up to adapt a simulation function, which contains the properties of the component sample (1) as parameters, to the electrical measured values, wherein an output device (30) is provided and is set up to output the material properties from the adapted simulation function, and wherein a control device (40) is also provided and can be used to control at least one of the measuring device (10) and the simulation and evaluation device (20) on the basis of a stored, sample-specific control function. A method for detecting properties of a material contained in at least one component sample (1) is also described.

Description

technical field [0001] The invention relates to a testing device for testing properties of at least one material contained in a sample of a structural element, in particular for testing electronic structural elements on the basis of at least one electrical measurement carried out on a sample of a structural element, As an inspection device for the properties of materials such as organic light-emitting diodes. Furthermore, the invention relates to a method for testing the properties of materials contained in a sample of a structural element, in particular for testing the properties of a material of an electronic structural component, wherein the method is included in the test of the structural element At least one electrical measurement is performed on the sample. The invention finds application in particular in the case of the characterization of materials of electronic components, in particular optoelectronic components. The invention is particularly suitable for the charac...

Claims

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Application Information

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IPC IPC(8): G01R31/26
CPCG01R31/2601G01R31/2635G01R31/2648
Inventor 罗伯特·尼切维尔纳·贝克尔
Owner SIM4TEC
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