Five-cavity full-automatic electron beam deposition system

An electron beam deposition, fully automatic technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of long production time and high cost, so as to increase production, save pumping time and reduce cost Effect

CN104630718AInactive Publication Date: 2015-05-20SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI

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Patent Information

Authority / Receiving Office: CN · China
Current Assignee / Owner: SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
Publication Date: 2015-05-20
Estimated Expiration: Not applicable · inactive patent

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Abstract

The invention relates to the technical field of preparing various thin films on glass, plastic and ceramic matrixes and particularly relates to a five-cavity full-automatic electron beam deposition system. The system comprises a suction system and five cavities which comprise a transmission cavity I, a loading cavity I, a process cavity, a loading cavity II and a transmission cavity II sequentially communicated, wherein the cavities are connected with the suction system; vacuum locking systems are arranged between the loading cavity I and the process cavity and between the loading cavity II and the process cavity; sample carrying plates are arranged in the loading cavity I, the process cavity and the loading cavity II. According to the system provided by the invention, the suction time after exchanging the sample carrying plate every time in the process cavity is shortened while the output is high, so that the process flow of the process cavity and pick-and-place of the sample carrying plate in the loading cavities I and II are carried out at the same time. Moreover, other parts except a process cavity door and doors of the loading cavities I and II in the clean room can be placed in a common environment, so that the cost is relatively low.

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Description

Technical field

[0001] The invention relates to the technical field of preparing various thin films on glass, plastic and ceramic substrates, in particular to a five-cavity fully automatic electron beam deposition system. Background technique

[0002] The application of electron beam deposition metallizes the plastic surface, combines organic and inorganic materials, greatly improves its physical and chemical properties, makes its surface smooth, and improves surface hardness. The surface of the original plastic is soft and easily damaged. Through vacuum coating, the hardness and abrasion resistance are effectively increased, and the water absorption is reduced. The more coating times, the fewer pinholes and the lower the water absorption. The product is not easy to deform, easy to clean, and does not absorb dust. The electron beam deposition method is a continuous automated production method with the most mature technology and simpler operation among several methods for prepari...

Claims

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