Laser interference control method for grating mechanical ruling engine

Abstract

The invention discloses a laser interference control method for a grating mechanical ruling engine, belongs to the field of mechanical ruling plane diffraction grating manufacturing, and aims at solving the problems that the ruling positioning accuracy is influenced by the tilt angle of a worktable and the rapid control requirement of a grating ruling position cannot be met in the prior art. The laser interference control method disclosed by the invention comprises the following steps of firstly performing operation debugging on the grating ruling engine; measuring the relative position change between a reference mirror and a strip measurement mirror through a grating graver interferometer in a ruling process; measuring the relative position changes between two worktable interferometers and the strip measurement mirror in the direction of Z axis by the two worktable interferometers respectively; performing real-time adjustment on the position of the grating graver by a grating graver piezoelectric actuator according to the position measurement result of the grating graver interferometer; performing tilt angle correction on the worktable by two worktable piezoelectric actuators according to the position measurement results of the two worktable interferometers respectively; implementing hardware control operation of the worktable piezoelectric actuators and the grating graver piezoelectric actuator through an FPGA (field programmable gate array).

Description

technical field [0001] The invention belongs to the field of manufacturing mechanically scribed plane diffraction gratings, and in particular relates to a laser interference control method for a grating mechanically scribed machine. Background technique [0002] The mechanical scribing method is currently a main method for making master gratings, especially the best choice for making infrared laser gratings with low line density and most echelle gratings and other special-purpose gratings. The mechanical scribing method uses a grating mechanical scribing machine to realize the grating scribing, so the advantages and disadvantages of the automatic control method of the grating mechanical scribing machine affect the performance index of the mechanical scribing grating. The control state of the grating marking machine is mainly divided into the macro positioning state and the marking state. The macro positioning state is used to realize the positioning operation of the micron-...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to propose a laser interference control method for a grating mechanical marking machine, which solves the problems in the prior art that the marking positioning accuracy is affected by the swing angle of the workbench and cannot meet the requirements for rapid control of the position of the grating marking line

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