Three-axis monolithic integrated resonant capacitive silicon micro-accelerometer and its processing method

Abstract

The invention discloses a three-axis single-chip integrated resonant capacitive silicon micro-accelerometer, which includes a glass substrate and a main structure with a bonding anchor point suspended at the center of the surface of the glass substrate; the main structure includes a sensitive mass frame and is installed on the sensitive mass. Two torsion-type masses, capacitor comb groups and four resonators at the center of the block frame; two torsion-type masses are arranged vertically, and each torsion-type mass is composed of two mass pendulums connected horizontally, and The left and right sides of each torsion-type mass block are respectively provided with capacitor comb groups; the four resonators are respectively installed on the outer sides of the four corners of the sensitive mass block frame through lever mechanisms; the glass substrate is provided with electrodes connected to the main structure Signal leads. The present invention performs differential output when measuring the accelerations in the three directions of X, Y, and Z to improve the detection accuracy, and the X and Y axes adopt the resonant type, and the Z axis adopts the capacitive type with low cost. The processing method in the present invention is simple and reliable. Mass production.

Description

technical field [0001] The invention relates to the field of micro-electromechanical and inertial sensors, in particular to a three-axis single-chip integrated resonant capacitive silicon micro-accelerometer and a processing method thereof. Background technique [0002] Micromachined accelerometer is an important micro-inertial navigation sensor. With the continuous development of micro-electro-mechanical systems (MEMS), silicon micro-accelerometers made of MEMS have the advantages of small size, light weight, low cost and high reliability. , low power consumption, mass production and other advantages. In the field of inertial navigation, research on silicon micromachined accelerometers has now attracted more and more attention from research institutes and universities. [0003] Capacitive microaccelerometers are small in size, high in sensitivity and resolution, and good in stability and temperature linearity. Silicon micro-resonant accelerometer is a high-precision micro...

AI Technical Summary

Problems solved by technology

This kind of accelerometer has simple structure, simple processing and mature technology, but the overall size is large, the cross-axis interference is relatively serious, and there are also large installation errors and line interference, which affect the development and use of silicon micro-accelerometers.

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