A kind of ultra-micro planar electrode array sensor and its preparation method
A technology of array sensors and microelectrode arrays, which is applied in stress-stimulated microbial growth methods, piezoelectric/electrostrictive/magnetostrictive devices, televisions, etc., and can solve problems such as large electrode size, many recording points, and difficult detection , to achieve the effect of more recording points, uniform performance, and conducive to transient detection
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[0035] figure 1 A process flow chart of a preparation method of an ultramicroplanar electrode array sensor proposed by the present invention is shown. Such as figure 1 As shown, the method includes:
[0036] Step 1. After cleaning the insulating substrate, apply photoresist on the substrate; positive or negative resist can be used, and different photoresists can be used according to different plate making methods. After photolithography and development on the glue, the required leads and electrodes are formed to form a micro-electrode array pattern.
[0037] Step 2, sputtering the micro-electrode conductive film layer on the entire substrate, the micro-electrode conductive film layer is a layer of electrode metal layer, peeling off the photoresist to leave the required electrodes, leads and contacts to form the basic metal electrode array. The electrodes are composed of a two-layer structure comprising a lower seed layer of metal titanium (Ti) or chromium (Cr) and an upper...
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