A kind of ultra-micro planar electrode array sensor and its preparation method

A technology of array sensors and microelectrode arrays, which is applied in stress-stimulated microbial growth methods, piezoelectric/electrostrictive/magnetostrictive devices, televisions, etc., and can solve problems such as large electrode size, many recording points, and difficult detection , to achieve the effect of more recording points, uniform performance, and conducive to transient detection

Active Publication Date: 2016-08-24
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The present invention is aimed at the real-time detection of micro-substances released by cells and synaptic vesicles, and solves the current problems: only a single cell or vesicle can be detected, and only one neurotransmitter can be detected at a time. In-house detection; design and prepare a small site, many recording points, no damage to nerve cells, and can simultaneously detect multiple recording points on a two-dimensional scale (simultaneous detection of multiple cells, multiple neurotransmitters) planar electrode array sensor

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  • A kind of ultra-micro planar electrode array sensor and its preparation method
  • A kind of ultra-micro planar electrode array sensor and its preparation method
  • A kind of ultra-micro planar electrode array sensor and its preparation method

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[0035] figure 1 A process flow chart of a preparation method of an ultramicroplanar electrode array sensor proposed by the present invention is shown. Such as figure 1 As shown, the method includes:

[0036] Step 1. After cleaning the insulating substrate, apply photoresist on the substrate; positive or negative resist can be used, and different photoresists can be used according to different plate making methods. After photolithography and development on the glue, the required leads and electrodes are formed to form a micro-electrode array pattern.

[0037] Step 2, sputtering the micro-electrode conductive film layer on the entire substrate, the micro-electrode conductive film layer is a layer of electrode metal layer, peeling off the photoresist to leave the required electrodes, leads and contacts to form the basic metal electrode array. The electrodes are composed of a two-layer structure comprising a lower seed layer of metal titanium (Ti) or chromium (Cr) and an upper...

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Abstract

The invention discloses a preparation method of a dual mode (two mode signals-electrophysiological signal and electrochemical signal) ultramicro planar array sensor for quantitative assay of nerve cell quantum release. An ultramicro planar electrode (0.5-5 mum) is prepared through combination of a double layer wiring design, a high precision stepping photolithography technique and a partition isolation design. According to the method, orientated nanometer modification, biological compatibility modification and specific recognition enzyme modification are combined and performed on the surface of an electrode array so as to prepare the dual mode planar ultramicro electrode array sensor. The dual mode planar ultramicro electrode array is prepared by the method combining a micro electromechanical system technique, a nanometer modification technique and a biological modification technique. Through adoption of the method, the limitations of large electrode site size (10-50 mum) of a conventional planar microelectrode and single site detection of a rodlike carbon fiber electrode are broken. The ultramicro planar electrode array prepared by the method has small electrode site and multiple recording points, does not damage nerve cells, and can simultaneously detect neurotransmitter quantum release of a plurality of nerve cells and dual mode information of an electrophysiological action potential signal in real time in situ.

Description

technical field [0001] The invention relates to the technical field of micro-nano preparation of biosensors and electroanalytical chemistry, and relates to an ultramicro array sensor capable of simultaneously detecting various electrochemical neurotransmitter signals of cell electrophysiology and cell multi-synaptic sites and a preparation method thereof. Background technique [0002] The neurotransmitters stored in vesicles at the axon terminal of nerve cells are quite stable, and they are released in units of vesicles, which is called quantum release. The arrival of an action potential can discharge the contents of about 200 to 300 vesicles. Real-time recording of quantized neurotransmitter release by nerve cells is an important and direct way to understand nerve signal transduction and mechanism of action. To monitor quantum release from cells, analytical techniques with ultra-high sensitivity, high selectivity, high time-resolution, high-space resolution, and ultra-smal...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02B82B3/00C12M1/42
Inventor 蔡新霞刘春秀蒋庭君宋轶琳
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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