Love wave device structure and detecting method for liquid multiparameter sensing

Abstract

The invention discloses a love wave device structure and detecting method for liquid multiparameter sensing. The love wave device structure comprises a piezoelectric substrate, a piezoelectric film, a first reflecting grating, a second reflecting grating, an interdigital transducer, a first liquid sensitive area and a second liquid sensitive area. The interdigital transducer is deposited at the middle portion of the piezoelectric substrate surface, the first reflecting grating (3) and the second reflecting grating (4) are deposited at the left side and the right side of the piezoelectric substrate surface respectively, the piezoelectric film is sputtered on the piezoelectric substrate surface, the first liquid sensitive area is arranged between the first reflecting grating and the interdigital transducer, and the second liquid sensitive area is arranged between the second reflecting grating and the interdigital transducer. The love wave device structure and detecting method for liquid multiparameter sensing has the advantages that parallel detection on liquid density, viscosity, dielectric constant and specific conductance is realized only with one love wave device, influence of liquid volumetric modulus of elasticity to a measuring result can be eliminated, and a passive wireless function is possessed.

Description

technical field [0001] The invention relates to an acoustic wave device, in particular to a Love wave device structure and detection method for liquid multi-parameter sensing, belonging to the field of novel sensors. Background technique [0002] Liquid sensors are mainly used to detect the characteristic parameters of the liquid itself, usually including the measurement of two mechanical parameters of density and viscosity and two electrical parameters of dielectric constant and conductivity (in some special cases, it is also necessary to measure the volume of the liquid Elastic Modulus). Liquid detection not only focuses on a single specific characteristic parameter of the liquid, but also hopes to be able to detect multiple characteristic parameters of the liquid in parallel. Today, with the rapid development of science and technology, especially information science and technology, wireless sensor technology has become a development trend and research hotspot in the fiel...

AI Technical Summary

Problems solved by technology

But so far, it has not been possible to use only one acoustic wave device to realize simultaneous parallel sensitivity to liquid density, viscosity, dielectric constant, and conductivity.

When using multiple devices for measurement, the consistency of the measurement conditions cannot be fully guaranteed, so there is uncertainty in the measurement results, especially in wireless measurement

At the same time, the measurement of multiple devices still has problems such as the cumbersome measurement method and the complexity of subsequent signal processing.

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