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Tunable chemical sensing device

A sensing device and chemical technology, applied in the field of chemical sensors, can solve problems such as variation of the initial value of chemical sensors, errors in resistance or capacitance physical quantities of chemical sensors, etc., and achieve the effect of correcting the initial value of impedance and reducing errors

Inactive Publication Date: 2015-07-29
SENSOR TEK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the production of chemical sensors, when the entire wafer is deposited with metal or coated with uneven polymer materials, the initial value of the chemical sensors will vary, and the resistance output by the chemical sensors or The physical quantity of capacitance will also produce errors

Method used

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  • Tunable chemical sensing device
  • Tunable chemical sensing device
  • Tunable chemical sensing device

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Embodiment Construction

[0036] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:

[0037] In the various embodiments listed below, the same or similar elements will be represented by the same reference numerals.

[0038] Please refer to figure 1 As shown, it is a schematic diagram of a calibrated chemical sensing device according to an embodiment of the present invention. The correctable chemical sensing device 100 includes a sensing unit 110, a plurality of first pads (Pad) 161, 162, 163, 164, 165, 166, 167, 168, a value readout circuit 170, a plurality of second pads Pads 181, 182, 183. Moreover, the sensing unit 110 of this embodiment, a plurality of first pads (Pad) 161, 162, 163, 164, 165, 166, 167, 168, a value readout circuit 170, a plurality of second pads 181, 182 and 183 may be implemented in a system on chip (System on Chip, SOC) manner.

[0039] The sensing unit 110 has a first impedance elem...

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Abstract

A tunable chemical sensing device includes a sensing unit, a plurality of first pads, a value reading circuit and a plurality of second pads. The sensing unit has a first impedance component and a plurality of second impedance components. The first impedance component and the second impedance components respectively have a first terminal and a second terminal. The second impedance components respectively have a different impedance value. The first pads are respectively coupled to the corresponding first and second terminals. The value reading circuit has a first input terminal, a second input terminal and an output terminal. The second pads are respectively coupled to the corresponding first input terminal, second input terminal and output terminal. A coupling relationship between the first pads and the second pads is adjusted to tune an impedance value of the sensing unit.

Description

technical field [0001] The invention relates to a chemical sensor, in particular to a correctable chemical sensing device. Background technique [0002] Generally speaking, the chemical sensor changes the physical quantity of its internal resistance or capacitance with the concentration of the gas or liquid to be measured, and reflects the state of the sensed gas or liquid through the change of the physical quantity of resistance or capacitance. . Chemical sensors are often used in carbon monoxide sensors, oxygen sensors, or humidity sensors, etc. Therefore, accurate sensing signals, stable functions, and power saving of chemical sensors are very important. [0003] Moreover, the manufacture of chemical sensors needs to pass through additional sensing materials, such as metal oxides (tin dioxide, SnO 2 ; Tungsten Dioxide, WO 2 ) and polymer materials (polyimide, Polyimide). However, in the production of chemical sensors, when the entire wafer is deposited with metal or c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/02
CPCG01N27/028
Inventor 刘茂诚赵晧名周文介吕柏纬翁淑怡王竣傑
Owner SENSOR TEK