Temperature Sensor
A temperature sensor and sensor technology, which is applied to thermometers, resistors with negative temperature coefficients, and parts of thermometers, etc., can solve the problems of damage measurement objects, large volume of thermal sensitive elements, and difficult temperature detection, etc., to achieve accurate Effect of measurement temperature, good B constant, and high heat resistance
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[0102] Next, for the temperature sensor involved in the present invention, refer to Figures 10 to 18 , the results of the evaluation by the examples prepared according to the above-mentioned embodiments will be described in detail.
[0103]
[0104] Examples and comparative examples for evaluating the thermistor material layer (thin film thermistor portion 7 ) of the present invention were prepared as follows Figure 10 The element 121 for film evaluation is shown.
[0105] First, by the reactive sputtering method, using Ti—Al alloy targets of various composition ratios, on the Si wafer with thermal oxide film to serve as the Si substrate S, at various composition ratios shown in Table 1, a thickness of Thin-film thermistor portion 7 of 500 nm metal nitride material. The sputtering conditions at this time were as follows: reaching vacuum degree: 5×10 -6 Pa, sputtering gas pressure: 0.1 to 1 Pa, target input power (output): 100 to 500 W, and produced by changing the nitro...
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Abstract
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