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Microhole precision-machining method based on dielectrophoresis

A technology of precision machining and tiny holes, applied in the field of precision machining, can solve the problem of not being able to take into account high precision, high efficiency and high consistency at the same time, and achieve the effect of increasing the residence time and the number of abrasive particles, and improving the machining efficiency.

Active Publication Date: 2015-09-02
沈阳慧通远达冶金技术研发有限公司
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to overcome the shortcomings of the existing micro-hole processing methods that cannot simultaneously take into account high precision, high efficiency and high consistency, the present invention provides a micro-hole precision machine based on dielectrophoretic effect that can achieve high precision, high efficiency and high consistency. processing methods

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  • Microhole precision-machining method based on dielectrophoresis
  • Microhole precision-machining method based on dielectrophoresis
  • Microhole precision-machining method based on dielectrophoresis

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings.

[0029] refer to figure 1 ~Fig. 4, a kind of micro-hole precision machining method based on dielectrophoretic effect, the device that realizes this method comprises exciter 13, and described exciter 13 is installed with luffing vibrating rod 12, and described luffing vibrating rod The end of 12 is spherical, and it is pressed on the working pressure plate 11. The said working pressure plate 11 presses the hole-shaped impact piece 9, and the hole-shaped impact piece 9 is placed in the hole-shaped impact piece holder 8 holes. The impact member holder 8 is positioned by a positioning cylindrical pin 10, and the positioning cylindrical pin 10 is installed on the workbench 2. Below the hole-shaped impact member 9 is the workpiece 6 to be processed, and the workpiece 6 is placed on the reference worktable 5 Above, the reference worktable 5 is installed on the hydraulic pisto...

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Abstract

Disclosed is a microhole precision-machining method based on dielectrophoresis. A device for implementing the microhole precision-machining method comprises a vibration exciter, an amplitude-change vibrating rod, an acting press plate, hole punching pieces, cylindrical positioning pins, a worktable, a base work bedplate and a hydraulic piston, a sealing shell is mounted on the worktable, a grinding liquid inlet nozzle and an opening for grinding liquid to flow back to a grinding liquid tank are formed in the sealing shell, a first electrode plate is mounted on a hole punching piece holding support, and a second electrode plate is mounted on the base work bedplate. When the vibration exciter works, the amplitude-change vibrating rod linked with the vibration exciter applies load and vibration to the hole punching pieces in hole punching piece holding support holes indirectly on the acting press plate to adjust oil pressure in a hydraulic oil chamber to enable a workpiece to be in constant contact with the hole punching pieces, so that microhole precision-machining of the workpiece is achieved. The microhole precision-machining method based on the dielectrophoresis has the advantages that machining precision, machining efficiency and machining consistency of microholes are achieved.

Description

technical field [0001] The invention relates to the technical field of precision machining, in particular to micro-hole precision machining based on the dielectrophoretic effect. Background technique [0002] With the wide application of micro-electromechanical systems in aerospace, national defense, electronic industry and other fields, system components are gradually developing towards precision and miniaturization. The precision machining of tiny holes on system components such as , ceramics, hard alloys, diamonds, and carbon fiber composite plates is becoming more and more difficult. In order to solve the technical problems of precision machining of micro-holes in difficult-to-machine materials, new processing methods are constantly being explored. [0003] The precision machining methods of tiny holes can be divided into three categories: mechanical machining, special machining and compound machining. Machining mainly includes mechanical drilling, grinding, micro-hole...

Claims

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Application Information

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IPC IPC(8): B24B1/00
CPCB24B1/002
Inventor 邓乾发吕冰海
Owner 沈阳慧通远达冶金技术研发有限公司
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