Two-dimensional force measuring main shaft fixture based on phase-sensitive detector (PSD) principle

A spindle and principle technology, applied in the direction of manufacturing tools, measuring/indicating equipment, metal processing machinery parts, etc., can solve the problems of dependence, difficult real-time online feedback, etc., and achieve the effect of good alignment, simple structure and high sensitivity

Active Publication Date: 2015-09-16
HARBIN INST OF TECH
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  • Abstract
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Problems solved by technology

[0004] The purpose of the present invention is to provide a two-dimensional force measuring spindle fixture based on the PSD principle, in order to solve the problem that the existing force detection method mainly relies on an external

Method used

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  • Two-dimensional force measuring main shaft fixture based on phase-sensitive detector (PSD) principle
  • Two-dimensional force measuring main shaft fixture based on phase-sensitive detector (PSD) principle

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[0015] Specific implementation mode 1: Combination figure 1 with figure 2 As shown, it includes a flexible spindle base 1, a follower reflective plane mirror 2, a fixed reflective plane mirror 3, a semiconductor laser 4, and a one-dimensional PSD position sensor 5;

[0016] The flexible spindle base 1 is composed of an upper fixed plate 1-1 connected to a lower fixed shaft plate 1-3 through a plurality of flexible uprights 1-2, and the fixed shaft plate 1-3 is provided with a shaft to be detected. The fixed shaft hole 1-4 of 6; the follower reflecting mirror 2 is inlaid on the right end surface of a flexible column 1-2 on the right side of the flexible spindle base 1. When the detected shaft 6 receives an external force, due to multiple bending The rigidity value of the flexible column 1-2 is low. The detected axis 6 can drive the fixed axis plate 1-3 to swing, and the fixed axis plate 1-3 will drive multiple flexible columns 1-2 to swing, and also drive the flexible spindle sea...

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Abstract

The invention discloses a two-dimensional force measuring main shaft fixture based on a phase-sensitive detector (PSD) principle, which belongs to the technical field of precision measurement, wherein a flexible main shaft seat comprises an upper fixed plate which is connected with a lower fixed shaft plate through a plurality of flexible stand columns, when a detected shaft is forced by external force, the detected shaft can drive a fixed shaft plate to swing because the flexible stand columns are low in rigid value, and also can drive a follow-up reflective plane mirror which is arranged on the right end surface of a flexible stand column which is arranged on the right of the flexible main shaft seat to swing simultaneously, reflective surfaces of the follow-up reflective plane mirror and a fixed reflective plane mirror are parallel and opposite to each other, laser which is launched from a semiconductor laser is sent into a photosensitive window of a one-dimensional PSD position sensor after being reflected through the reflective planes of the follow-up reflective plane mirror and the fixed reflective plane mirror for many times. The two-dimensional force measuring main shaft fixture based on the PSD principle converts force to micro displacement by utilizing a flexible hinge main shaft seat, detects force of a main shaft by further utilizing a magnifying principle of light lever and adopting PSD to measure positions, and achieves force feedback.

Description

technical field [0001] The invention belongs to the technical field of precision measurement. Background technique [0002] With the continuous development of ultra-precision machining technology, especially in the fields of precision optical processing, national defense cutting-edge product processing, and micro-device processing, the force acting on tools and workpieces during processing has attracted more and more attention. For example, the size of the grinding force in optical processing directly affects the surface microcracks of the workpiece. If the microcracks cannot meet the requirements, the service life and effect in actual use will be greatly affected. In the processing of some metal micro-components, the size of the grinding force directly affects the dimensional accuracy and mechanical properties of the workpiece; too much grinding force may directly cause deformation and failure of the micro-components, and at the same time reduce its tensile and compressive ...

Claims

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Application Information

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IPC IPC(8): B23Q17/00B23Q17/24
CPCB23Q17/00B23Q17/24
Inventor 丁飞苏星王波张鹏李国
Owner HARBIN INST OF TECH
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