Thin film, dope composition, production method thereof, and solution film production method
A composition and film technology, applied in chemical instruments and methods, liquid and solid mixing and dissolution, etc., can solve problems such as film wrinkling, and achieve the effect of suppressing depression and reducing adhesion to each other
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Embodiment 1
[0106] As Example 1, 17 kinds of experiments 1-A to 1-Q were performed. In this Example 1, three kinds of dispersion liquids of microparticles 14 with trade names of R972, NX90S, and RX200 (all manufactured by Nippon Aerosil Co., Ltd.) were used. Here, the dispersion liquids of the three types of microparticles 14 are summarized in Table 1 below. In the dispersion liquids of the respective trade names described in the columns of "Dispersion Liquid" in Table 1, the substances constituting the microparticles 14 are shown in the "Particles" column, and the substances constituting the dispersant are shown in the "Dispersion Agent" column. For the substance, the concentration of the fine particles 14 in the dispersant [unit: mass %] is shown in the "particle concentration" column, and the average value of the primary particle diameter r1 of the fine particles 14 is shown in the "primary particle diameter" column [unit: nm ], the average value [unit: μm] of the secondary particle d...
Embodiment 2
[0157] In Example 2 of the present invention, seven kinds of thin films 10 were manufactured using the above-mentioned solid matter A, and the primary particle diameter r1 of the fine particles 14 and the added amount thereof were set as variables, and the protrusion height H effective for reducing sticking was confirmed. Among the 7 types of films, the films whose sticking area ratio S was 0% to 50% in the above-mentioned sticking evaluation method were randomly selected.
[0158] For these seven kinds of thin films 10, the density of protrusions with a height of 10 nm or more was obtained respectively (protrusion density D(10) [unit: number / mm 2 ]), the density of protrusions with a height of 20 nm or more (protrusion density D(20) [unit: number / mm 2 ]), the density of protrusions with a height of 30 nm or more (protrusion density D(30) [unit: piece / mm 2 ]), the density of protrusions with a height of 40 nm or more (protrusion density D(40) [unit: piece / mm 2 ]), the densit...
Embodiment 3
[0163] In Example 3, ten kinds of thin films 10 produced by the same method as in Examples 1 and 2 above were used to confirm which kind of particles are included in the protrusions that are effectively reduced in sticking. The 10 kinds of films were randomly selected from films whose sticking area ratio S was 0% to 50% in the above-mentioned sticking evaluation method.
[0164] The ten kinds of films 10 were observed with a SEM (Scanning Electron Microscope, scanning electron microscope) from a direction approximately perpendicular to the film surface 10a, and the distribution of the secondary particle size r2 of the particles present on the film surface 10a of each film 10 was investigated. . The ten types of films 10 were plotted in a graph in which the content ratio N (0.7) [unit: %] of the microparticles 14 was taken on the horizontal axis, and the ratio S of the sticking area was taken on the vertical axis. As a result, Figure 15 The graph shown. Depend on Figure 15...
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Abstract
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