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Capacitive displacement transducer

A displacement sensor and capacitive grid technology, applied in the field of linear displacement and angular displacement sensors, can solve the problems that affect the measurement accuracy, the high precision of capacitive grid displacement sensors are difficult to be reliable, damage and other problems, and achieve the expansion of application fields, wide use environment, anti-interference powerful effect

Inactive Publication Date: 2015-09-16
UNITED PRECISION MACHINE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the capacitive grid displacement sensor, especially the small electrode spacing high-density capacitive grid displacement sensor, is very sensitive to the dielectric environment between the electrodes. Once a medium such as water or oil enters between the transceiver electrode substrate and the coupling electrode substrate, it will destroy the grid. The uniformity of the air medium between the transmitting electrode group and the grid-shaped coupling electrode group, or between the receiving electrode and the grid-shaped coupling electrode group, will seriously affect the measurement accuracy, making it difficult to reliably obtain the theoretical high precision of the capacitive grid displacement sensor. accomplish

Method used

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specific Embodiment approach 1

[0038] Such as figure 1The shown 8-way drive phase detection type capacitive linear displacement sensor 100 mainly includes a transceiver electrode substrate 110, a coupling electrode substrate 120 and an 8-way drive phase detection circuit 130, and the transceiver electrode substrate 110 and the coupling electrode substrate 120 are both It is a glass substrate; the linear grid-shaped transmitting electrode group 111 and the receiving electrode 112 are prepared on the transceiver electrode substrate 110, and the grid-shaped coupling electrode group 121 is prepared on the coupling electrode substrate 120; the transmitting electrode group 111 is a multilayer electrode structure, consisting of four groups The grid emitter electrodes are connected in parallel, a group of grid emitter electrodes is eight, the distance between adjacent emitter electrode grids is 0.127mm, and the distance between groups is 1.016mm, and the emitter electrodes of the same phase in each group are connect...

specific Embodiment approach 2

[0041] Such as figure 2 A high-precision capacitive linear displacement sensor 200 shown mainly includes a transceiver electrode substrate 210, a coupling electrode substrate 220, a flexible circuit board 230 for communication, an 8-way drive phase detection circuit 240, a transceiver electrode substrate 210 and a coupling electrode The substrate 220 is a glass substrate; the linear grid-shaped transmitting electrode group 211 and the receiving electrode 212 are prepared on the transceiver electrode substrate 210, and the grid-shaped coupling electrode group 221 is prepared on the coupling electrode substrate 220; the transmitting electrode group 211 is a high-density single-layer electrode Structure, the distance between adjacent emitter electrode grids is 0.0635mm, which is composed of four groups of grid-shaped emitter electrodes connected in parallel, one group is eight emitter electrode grids, the group spacing is 0.508mm, and each emitter electrode grid is conductive thr...

specific Embodiment approach 3

[0044] Such as image 3 A high-precision capacitive linear displacement sensor 300 shown mainly includes a transmitting electrode substrate 310, a receiving electrode substrate 320, a flexible circuit board 330 for communication, and a detection circuit 340. Both the transmitting electrode substrate 310 and the receiving electrode substrate 320 are made of glass. Substrate; the linear grid-shaped transmitting electrode group 311 is prepared on the transmitting electrode substrate 310, and the grid-shaped receiving electrode 321 is prepared on the receiving electrode substrate 320; the transmitting electrode group 311 is a high-density single-layer electrode structure, and the distance between adjacent transmitting electrode grid bars It is 0.0635mm, and it is composed of four groups of grid emitter electrodes connected in parallel. One group is eight emitter electrode grid bars with a group spacing of 0.508mm. Each emitter electrode grid bar is connected to a flexible circuit b...

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Abstract

The invention provides a linear displacement and angular displacement grid electrode capacitive displacement transducer. Non-gas liquid dielectric material such as oil and colloid fills the space between two electrodes of the grid capacitor, stability and uniformity of the dielectric environment between the electrodes of the grid capacitor can be ensued, sensitivity of the capacitive displacement transducer on the use environment can be solved completely, a breakthrough is generated on measurement precision and stability of the capacitive displacement transducer, and the measurement precision of straight feeding for a thousandth or above can be achieved stably and reliably in the condition of not needing any mechanical amplification.

Description

technical field [0001] The invention relates to a linear displacement sensor and an angular displacement sensor, in particular to a capacity grid displacement sensor with a grid electrode. Background technique [0002] The capacitive displacement sensor has the advantages of small size, low power consumption, and long-distance measurement, and has been widely used in displacement detection. The resolution of the capacitive grid displacement sensor depends on the distance between adjacent emitter grids. The resolution of the usual 8-way drive phase detector type capacitive grid displacement sensor is 0.01mm, and the distance between adjacent emitter electrode grids is 0.635mm. There are 8 grids. The actual sensor uses multiple groups of grids in parallel. The electrodes of the same phase in each group are interconnected. The group spacing is 5.08mm. The grid-shaped emitter electrode group is currently a printed circuit board (PCB board) made of glass fiber material. Double-s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02G01B7/30
Inventor 陈其良陈赋陈梅英康永忠
Owner UNITED PRECISION MACHINE