A Slope Adaptive Topography Measurement Method for Microstructured Workpieces

Abstract

The invention discloses a slope adaptive morphology measurement method for a microstructure workpiece, and relates to the technical field of microstructural surface shape quality detection. The method mainly comprises the steps of slope prediction, rotational scanning, error compensation, morphology reconstruction and the like. When a sample is measured, in the method a relative included angle can be automatically adjusted between a contact pin and the sample according to surface morphology changes of the measured sample, so that the scanning contact pin is enabled to adapt to slope changes of the surface of the sample, and phenomena such as outline interference and the like do not occur. The system can reconstruct surface morphology features of the sample according to an output value of a contact pin type displacement sensor, the movement amount of an XYZ micro-displacement platform, the rotation amount of a beta rotating bearing and the size of the tip radius of the contact pin after completion of scanning. Compared with an existing morphology measurement method, the method provided by the invention measures a microstructure with complex surface morphology features simply and effectively, and can reconstruct the surface morphology features of the sample accurately within a short time.

Description

technical field [0001] The invention relates to the technical field of microstructure surface shape quality detection, in particular to a slope adaptive shape measurement method for microstructure workpieces. Background technique [0002] With the development of precision processing technology, various microstructure devices are constantly appearing. These microstructure devices usually have complex surface geometry features, such as vertical sidewalls, steep slopes, sharp tip angles, etc. At present, the main difficulties in the measurement of these microstructure devices are: limited by the maximum detectable angle of the measurement system itself, there is a certain measurement blind area in the steep slope area, which introduces uncompensable measurement errors into the measurement results; how to quickly and accurately measure These microstructured devices have become an urgent scientific problem to be solved. [0003] In recent years, people have done a lot of researc...

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Problems solved by technology

Professor Ju Bingfeng of Zhejiang University has independently developed a new type of STM system and a high aspect ratio STM probe, and successfully measured the surface topography of the trapezoidal structure with a slope of 90° by rotating the sample to be tested, but the measurement process of this method It takes a long time, and the measurement error introduced by rotating scanning is relatively large, which cannot be eliminated by compensation

[0004] Weckenmann, A. et al. proposed the method of rotating the probe to reduce the measurement deviation, and verified the feasibility of the method through simulation. Henselmans et al designed a non-contact measuring machine to measure the surface profile of the optical free-form surface. Both methods measure steep slope surfaces by properly rotating the stylus. However, since the stylus used has a lateral resolution of several hundred microns, it cannot measure the surface profile of microstructures of several to hundreds of microns, which limits its scope of use

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