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Screen stretching device and screen stretching method used in process of manufacturing mask

A technology of mask plate and magnetic plate, which is applied in the direction of ion implantation plating, coating, electrical components, etc., can solve the problems of difficult alignment and affect the accuracy of pattern position, and achieve the effect of improving position accuracy

Active Publication Date: 2015-09-23
BOE TECH GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Yet, when utilizing above-mentioned mask board mask, because the gravitational effect of screen board 24 self can make the screen board 24 of the mask board of making sag, this can cause the pattern on the screen board 24 and need on the substrate to be vapor-deposited. The area of ​​the evaporation pattern is difficult to align, so it will affect the position accuracy of the pattern formed by the evaporation of organic materials on the substrate to be evaporated

Method used

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  • Screen stretching device and screen stretching method used in process of manufacturing mask
  • Screen stretching device and screen stretching method used in process of manufacturing mask
  • Screen stretching device and screen stretching method used in process of manufacturing mask

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0020] Such as figure 2 As shown, the stretching device 10 used in the manufacture of the mask provided by the embodiment of the present invention includes: a stretching machine 21, a clamp 25 arranged on the stretching machine 21, and a screen positioned above the stretching machine 21 and A magnetic plate 26 matched with the screen plate 12; wherein, the stretching machine platform 21 is also used for carrying the screen frame 22 and the alignment substrate...

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Abstract

The invention discloses a screen stretching device and screen stretching method used in a process of manufacturing a mask, and relates to the technical field of display. The device and method solve the problem that in the prior art, when a mask manufactured through a screen stretching device is evaporated, the position of a pattern formed in a manner of evaporating organic materials on a substrate to be evaporated is relatively low in accuracy. The screen stretching device comprises a screen stretching machine table and clamps arranged on the screen stretching machine table and further comprises a magnetic plate located above the screen stretching machine table. The vertical upward adsorption force of the magnetic plate to the screen plate in the mask to be manufactured is equal to the vertical upward adsorption force of a magnetic field system in a vacuum evaporating chamber to the screen plate in the mask in the evaporating process. The screen stretching device and screen stretching method are used for the manufacturing process of the mask.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a net stretching device and a net stretching method used when making a mask plate. Background technique [0002] At present, in the process of making the color filter layer of the OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display screen, a mask plate mask with a pattern is used to form a mask on the substrate to be evaporated by vacuum evaporation. desired pattern. The existing mask board includes a screen and a screen frame. When combining the screen and the screen frame, it is necessary to use a netting device to tension the screen on the screen frame, and then fix the screen to the screen frame to form the desired mask. mask board. [0003] Such as figure 1 As shown, the stretching device 00 in the prior art mainly includes: a stretching machine 21 and a clamp 25 arranged on the stretching machine 21 . During use, the screen frame 22 and the alignm...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04H10K99/00
CPCC23C14/042H10K71/166H10K71/00H10K71/164C23C14/24
Inventor 马利飞梁逸南
Owner BOE TECH GRP CO LTD
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