Variable-resonance nested loop-type MEMS vibration gyro with thick wall

Abstract

The invention provides a variable-resonance nested loop-type MEMS vibration gyro with the thick wall. The variable-resonance nested loop-type MEMS vibration gyro comprises a harmonic oscillator which comprises resonance rings, spoke-shaped supporting beams, and an anchor positioned at the center of the harmonic oscillator structure; the whole harmonic oscillator is fixedly anchored with a base by the anchor at the center of the harmonic oscillator; a plurality of resonance rings are nested at the periphery of the anchor by taking the anchor as the center; the spoke-shaped supporting beams are used for supporting every two adjacent resonance rings as well as between the innermost resonance ring and the anchor; the wall of the same resonance ring is same in thickness; and the walls of the resonance rings from inside to outside are different in thickness. According to the variable-resonance nested loop-type MEMS vibration gyro, the optimized resonance mass distribution and rigidity distribution are realized and further the optimization on comprehensive performances of the gyro is realized.

Description

technical field

[0001] The invention relates to a microelectromechanical gyroscope, and in particular to a MEMS vibrating gyroscope. Background technique

[0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. It plays a very important role in high-end industrial equipment and precision strike weapons such as aerospace, intelligent robots, and guided munitions. Value. Traditional gyroscopes include mechanical rotor gyroscopes, electrostatic gyroscopes, hemispherical resonant gyroscopes, laser gyroscopes, fiber optic gyroscopes, dynamic tuning gyroscopes, etc. Although they have high precision, they are difficult to meet the requirements in terms of size, power consumption, and price. MEMS gyroscopes based on micro-electromechanical system technology have the characteristics of small size, low power consumpti...

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