Micro electro mechanical system solid-state gyroscope with composite density and rigidity

Abstract

A micro electro mechanical system solid-state gyroscope with composite density and rigidity in the technical field of micro electro mechanical system comprises a detection mass block, oscillation starting drive mechanisms and detection mechanisms; wherein the upper surface and the lower surface of the detection mass block are symmetrically provided with two groups of identical oscillation starting drive mechanisms and detection mechanisms respectively; the oscillation starting drive mechanisms comprise two drive electrodes symmetrically arranged on the upper surface of the detection mass block; the detection mechanisms comprises signal interference isolation electrodes, angular velocity detection electrodes and modal detection electrodes, wherein four angular velocity detection electrodes are arranged at the external edges of the lower surface of the detection mass block symmetrically in a pairwise way, two modal detection electrodes are symmetrically arranged at the middle part of the lower surface of the detection mass block, and the signal interference isolation electrodes are arranged at the outsides of the modal detection electrodes in an encirclement way. The invention dispenses with special support beam structure, the whole structure is simple, the shock resistance is great, vacuum encapsulation is unnecessary, and the gyrotropic performance can be greatly improved.

Description

technical field [0001] The invention relates to a miniature gyroscope in the field of micro-electromechanical technology, in particular to a micro-electromechanical solid-state gyroscope with composite density and rigidity. Background technique [0002] Microelectromechanical systems (MEMS) was first formally proposed by Professor Roger Howe of the University of California, Berkeley at the Micro Wireless Manipulator Conference held in Salt Lake City in 1989. In the following ten years, MEMS technology has been widely used in countries all over the world. It has developed rapidly under the condition of investing a lot of manpower and financial resources, and has become a very important research field. [0003] Micro-inertial sensing devices such as micro-gyroscopes are one of the most important research fields of MEMS. At present, the proof masses of most micro-inertial devices are connected to the substrate through support beams. After searching the literature of the prior ...

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Problems solved by technology

At present, the proof masses of most micro-inertial devices are connected to the substrate through support beams. After searching the literature of the prior art, it is found that the Journal of Semiconductors, Vol. 28, No. 10, October 2007, 1630-1635 "based on the "8 Novel x-axis tuning fork silicon micromechanical gyroscope with beam-2-mass "structure" reported a vibrating micro-gyroscope, but still did not get rid of the structural mode that the proof mass is connected to the substrate through a support beam, with 8 cantilevers There are two mass blocks in the beam, and the structure and processing are relatively complicated. This type of support structure limits the vibration frequency and amplitude of the mass block and is greatly affected by manufacturing defects and difficult to adjust, thus limiting the further improvement of the performance of the micro-inertial device. It is also difficult to improve the impact resistance of

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