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Nested ring mems vibrating gyroscope with variable resonant ring wall thickness

A technology of vibrating gyroscope and resonant ring is applied in the direction of speed measurement, gyroscope/steering sensing device, measuring device, etc. with gyro effect.

Active Publication Date: 2018-05-25
NAT UNIV OF DEFENSE TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Although the design reflects higher performance, but the design needs to be improved

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  • Nested ring mems vibrating gyroscope with variable resonant ring wall thickness
  • Nested ring mems vibrating gyroscope with variable resonant ring wall thickness
  • Nested ring mems vibrating gyroscope with variable resonant ring wall thickness

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0027] The feature of the present invention is that the wall thicknesses of the same resonant ring are equal, and all nested rings have different wall thicknesses from the inside to the outside, and the resonator with variable wall thickness distribution can realize the optimization of quality and stiffness distribution, which helps to improve the performance of the gyroscope. One of the embodiments is that the wall thickness distribution function of the nested resonant ring decreases linearly from the inside to the outside, and its structure is as follows Figure 4 shown. The resonator 10 with variable wall thickness distribution includes a resonator ring 11, a spoke-shaped support beam 12, and an anchor point 13 located at the center of the resonator structure. The entire resonator is firmly anchored to the substrate through the anchor point 13 locat...

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Abstract

The invention provides a variable-resonance nested loop-type MEMS vibration gyro with the thick wall. The variable-resonance nested loop-type MEMS vibration gyro comprises a harmonic oscillator which comprises resonance rings, spoke-shaped supporting beams, and an anchor positioned at the center of the harmonic oscillator structure; the whole harmonic oscillator is fixedly anchored with a base by the anchor at the center of the harmonic oscillator; a plurality of resonance rings are nested at the periphery of the anchor by taking the anchor as the center; the spoke-shaped supporting beams are used for supporting every two adjacent resonance rings as well as between the innermost resonance ring and the anchor; the wall of the same resonance ring is same in thickness; and the walls of the resonance rings from inside to outside are different in thickness. According to the variable-resonance nested loop-type MEMS vibration gyro, the optimized resonance mass distribution and rigidity distribution are realized and further the optimization on comprehensive performances of the gyro is realized.

Description

technical field [0001] The invention relates to a microelectromechanical gyroscope, and in particular to a MEMS vibrating gyroscope. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. It plays a very important role in high-end industrial equipment and precision strike weapons such as aerospace, intelligent robots, and guided munitions. Value. Traditional gyroscopes include mechanical rotor gyroscopes, electrostatic gyroscopes, hemispherical resonant gyroscopes, laser gyroscopes, fiber optic gyroscopes, dynamic tuning gyroscopes, etc. Although they have high precision, they are difficult to meet the requirements in terms of size, power consumption, and price. MEMS gyroscopes based on micro-electromechanical system technology have the characteristics of small size, low power consumpti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656G01C19/5649
CPCG01C19/5649G01C19/5656
Inventor 吴学忠肖定邦吴宇列席翔邱华诚周鑫侯占强
Owner NAT UNIV OF DEFENSE TECH
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