Probe Sensing Device Based on Conjugate Focus Tracking Technology
A tracking detection, conjugate focus technology, applied in measurement devices, optical devices, instruments, etc., can solve the problems of complex device structure, low resolution, and difficulty in miniaturization, and achieve simple device structure, high resolution, and ease of use. The effect of detection
Active Publication Date: 2017-07-04
HARBIN INST OF TECH
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But the experiment was not successful, the sensing signal was completely submerged in the noise signal and could not be detected
[0012] The disadvantages of the existing probes described in the above-mentioned documents and the referenced documents mentioned above are: (1) the probes are difficult to manufacture and are not easy to miniaturize; (2) the intensity of the probe light is weak and difficult to detect; ( 3) No or weak three-dimensional detection capability; (4) low resolution; (5) complex device structure
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[0025] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0026] A probe sensing device based on conjugate focus tracking detection technology, comprising a laser 14, a collimator lens 13, a mirror 7, a microscopic objective lens 4, and an optical fiber probe 1 are sequentially arranged on the outgoing optical path of the laser 14, The fiber optic probe 1 is suspended and installed on the fixed seat 3 by hanging the shrapnel 2, and the fiber optic probe 1 is composed of an optical fiber 1a engraved with a fiber grating structure 1c inside and a probe contact ball 1b; The first beam splitter 5 is configured between the objective lens 4 and the reflection mirror 7, and the first collection lens 8 and the horizontal photodetector 9 are arranged successively on the reflected light path of the first beam splitter 5; A second beam splitter 6 is arranged between the reflectors 7, and a second collection len...
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The invention discloses a probe sensing apparatus based on a conjugation focus tracking detection technology, and belongs to the technical field of dimension measurement. A collimating lens, a reflector, a microobjective and a fiber probe are successively configured on the emission optical path of a laser, the fiber probe is installed on a fixing base through a suspended mode through a suspension spring, and the fiber probe is formed by assembling a fiber with a fiber grating structure engraved therein and a probe contact ball; a first spectroscope and a second spectroscope are successively configured between the microobjective and the fiber probe, a first collection lens and a transverse photoelectric detector are successively configured on the optical path of the first spectroscope, and a second collection lens and a axial photoelectric detector are successively configured on the reflection optical path of the second spectroscope; and the laser, the transverse photoelectric detector and the axial photoelectric detector are each driven by a electric control displacement bench to carry out three-dimensional motion. The apparatus provided by the invention has the following advantages: the manufacture is convenient, miniaturization is easily realized, the probe light intensity is high, the detection is easy, the apparatus has a three-dimensional detection and demodulation capability, the resolution is high, and the structure is simple.
Description
technical field [0001] The invention belongs to the technical field of dimension measurement, and mainly relates to a probe sensing device based on a conjugate focus tracking detection technology. Background technique [0002] In the field of cavity structure measurement with micro-size and large depth-to-diameter ratio, the use of optical fiber to make probes is an important solution, which has the advantages of easy miniaturization and easy fabrication. The existing probes are as follows: [0003] (1) The "dual optical fiber coupling contact micro-measurement force aiming sensor" described in the application number 200510072254.5. In this patent, a new structure sensor is proposed, which uses two optical fibers to burn coupling balls to realize the reverse direction of light transmission and detection of the outgoing light. [0004] Similar patents include: dual-fiber co-spherical coupling micro-measurement force aiming sensor with end-face microstructure (application num...
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IPC IPC(8): G01B11/00G01B11/02
Inventor 邹丽敏倪赫谭久彬
Owner HARBIN INST OF TECH