Magnetic suspension molecular pump control method and system

A control method and technology for a control system, which are applied in the field of magnetic levitation molecular pump control methods and systems, can solve problems such as system hardware damage, affecting industrial production processes, and the like, so as to avoid system shutdown, damage and impact on industrial production. Effect

Active Publication Date: 2015-11-11
苏州中科科仪技术发展有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is that the control method and system of the magnetic levitation molecular pump in the prior art directly shut down the operation under some minor fault conditions, which may cause damage to the system hardware and affect the industrial production process.

Method used

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  • Magnetic suspension molecular pump control method and system
  • Magnetic suspension molecular pump control method and system
  • Magnetic suspension molecular pump control method and system

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Embodiment Construction

[0044] This embodiment provides a method for controlling a magnetic levitation molecular pump, such as figure 1 shown, including the following steps:

[0045] S1: Detect whether there is a system failure; if there is, go to step S2, otherwise repeat this step.

[0046] S2: Obtain system fault information and determine the fault level.

[0047] S3: Determine whether the failure level is a first-level failure, if so, go to step S4, otherwise go to step S5. The first-level fault includes the fault state of some Hall sensors; by setting the correct signal value for the faulty Hall sensor, the system can be maintained to operate with faults.

[0048] S4: The system runs with a fault, and enters step S8.

[0049] S5: Determine whether the fault level is a secondary fault, if so, go to step S6, otherwise go to step S7. The secondary faults include under-voltage faults, over-voltage faults, motor over-current faults, motor short-circuit faults, motor over-temperature faults, pump ...

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Abstract

The invention provides a magnetic suspension molecular pump control method and a magnetic suspension molecular pump control system. System failure level is divided, and different operations are carried out on the system according to difference of the system failure level. For primary failure with lower level, for example a type that some of Hall sensors have failure, the system is kept to operate with failure, and continual observation about whether the failure is eliminated is carried out; and if the failure is eliminated within certain time, the normal operation of the system is restored. When the system has secondary failure, cannot continuously operate, but does not need to turn off, the system can be firstly kept to stop operation, and real-time detection about whether the system failure is eliminated or not is carried out. If the system failure is eliminated within certain time, the normal operation of the system can be continuously restored, and the system is controlled to turn off if the system failure exists all the time. Unnecessary system turn-off is avoided by virtue of a failure recovery state, so that damages to system hardware as well as influence on industrial production are avoided.

Description

technical field [0001] The invention relates to the field of fluid equipment control, in particular to a method and system for controlling a magnetic levitation molecular pump. Background technique [0002] The molecular pump is a kind of vacuum pump that uses the high-speed rotating rotor to transfer the momentum to the gas molecules, so that they can obtain a directional speed, and then be compressed and driven to the exhaust port to be pumped away by the front stage. The magnetic levitation molecular pump is a new type of high-performance molecular pump that uses magnetic bearings to generate electromagnetic force to suspend the rotor in the air, realizing no mechanical contact between the rotor and the stator, and the rotor position can be actively controlled. Because the magnetic levitation molecular pump has the advantages of no friction, no lubrication, no pollution, high speed, and long life, the magnetic levitation molecular pump is widely used in the field of vacuu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D27/00
Inventor 刘宏伟李奇志
Owner 苏州中科科仪技术发展有限公司
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