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A portable thin film thickness measuring device and a film thickness measuring method thereof

A thickness gauge and portable technology, which is applied in the field of portable film thickness gauge and its film thickness measurement, can solve the problems of no real saving of measurement time, complex and inconvenient portability of the device, and reduced reliability of measurement results, etc., to achieve easy portable layout , Realize online monitoring and measurement, and improve the effect of measurement performance

Active Publication Date: 2015-11-18
WUHAN EOPTICS TECH CO LTD
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AI Technical Summary

Problems solved by technology

[0006] It has the following problems: 1. The device is complicated and inconvenient to carry, and it is limited to a laboratory measuring instrument because the data processing depends on the computer; 3. The main measurement process still needs to be measured twice (measurement of the black sample and the sample to be tested), which does not really save the measurement time; 4. It always uses the same Correction results, however, this correction result will change over time, making the measurement results less reliable

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  • A portable thin film thickness measuring device and a film thickness measuring method thereof
  • A portable thin film thickness measuring device and a film thickness measuring method thereof
  • A portable thin film thickness measuring device and a film thickness measuring method thereof

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Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0025] Such as figure 1 As shown, the portable film thickness gauge of the embodiment of the present invention includes a light source 10, a first collimating mirror 20, a beam splitter 30, a second collimating mirror 40, a miniature spectrometer 50, an A / D conversion module 80 and a data processing module 90. The light source 10 is arranged at the focal point of the first collimating mirror 2...

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Abstract

The invention provides a portable thin film thickness measuring device and a film thickness measuring method thereof. Only two times of sample measurement is needed, so that the workload of users is not increased; the measurement performance is improved by means of a spectrum fitting method; three infrared distance measuring sensors on the measuring end face of the thickness measuring device are used for guaranteeing the vertical incidence relationship between standard samples and measuring beams, so that the operation convenience for a corrected sample measuring link is maintained. The portable thin film thickness measuring device has no reflector, so that a measuring light path is simpler, the overall structure is compact and a portable layout can be implemented conveniently. When the size of the conventional interference film thickness measuring instruments is reduced and portable measurement is allowed, the instruments can be applied to far more industrial environments; the instruments not only can serve as the portable film thickness instruments but also can be installed on a coating production line for online monitoring and measuring of thin films.

Description

technical field [0001] The invention belongs to the technical field of optical measurement of semiconductor thin films, and more specifically relates to a portable thin film thickness gauge and a method for measuring the thickness thereof. Background technique [0002] With the development of the semiconductor industry and the rise of thin film technology, thin films are more and more widely used in the fields of electronic components, micro-opto-electromechanical systems and optical components. The thickness of the film significantly affects the mechanical, electromagnetic, optical and photoelectric properties of the film. For example, the film thickness of the ITO transparent conductive film not only affects its resistivity but also affects its grain size and the preferred direction of the crystal plane. The thickness of the NiFe film affects Its magnetoresistive properties, V 2 o 5 The film thickness of the film affects its electrochromic performance and so on. Therefo...

Claims

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Application Information

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IPC IPC(8): G01B11/06
Inventor 张传维刘世元刘佳敏江浩陶泽
Owner WUHAN EOPTICS TECH CO LTD
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