MEMS (micro-electro-mechanical system) magnetic flux gate magnetometer testing system and controlling method thereof
A technology of micro-electromechanical systems and testing systems, applied in the direction of measuring devices, measuring electrical variables, instruments, etc., can solve the problems of high unit price of packaging technology, and achieve the effect of simple structure, easy implementation, and low cost
Active Publication Date: 2015-11-25
TSINGHUA UNIV
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Problems solved by technology
After the processing of the magnetometer probe is completed, the probe needs to be packaged for the next step of testing. However, due to the high unit price of the packaging process, if the probe can be simply tested before the probe is packaged to determine the performance of the probe and reject defective products, This will result in significant cost savings
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[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0027] The MEMS fluxgate magnetometer test system and its control method according to the embodiments of the present invention will be described below with reference to the accompanying drawings.
[0028] figure 1 It is a structural schematic diagram of a MEMS fluxgate magnetometer test system according to an embodiment of the present invention. Such as figure 1 As shown, the MEMS fluxgate magnetometer test system includes: signal excitation source 1, base 2, three-axis micro-motion platform 3, chip fixing device 4, probe card 5, data ...
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The invention provides an MEMS (micro-electro-mechanical system) magnetic flux gate magnetometer testing system and a controlling method thereof. The testing system comprises an excitation signal source, a base, and a three-axis micro-motion platform, a chip fixing device, a probe card, a data collection device, and a processing device. The three-shaft micro-motion platform is fixedly connected to the base to adjust the position of an MEMS magnetic flux gate magnetometer. The chip fixing device, used to fix the MEMS magnetic flux gate magnetometer, is arranged at the top of the three-axis micro-motion platform and moves along with the three-axis micro-motion platform. The probe card is connected to the base, the excitation signal source and the MEMS magnetic flux gate magnetometer to export signals outputted from the MEMS magnetic flux gate magnetometer when the MEMS magnetic flux gate magnetometer is switched on. The data collection device is connected with the probe card to collect outputted signals. The processing device is connected with the data collection device to receive the signals outputted from the MEMS magnetic flux gate magnetometer and to lock the phases of the outputted signals and amplify the outputted signals so as to obtain a test result. The testing system is cost-effective and is easy to perform.
Description
technical field [0001] The invention relates to the technical field of MEMS device testing, in particular to a micro-electromechanical system MEMS fluxgate magnetometer testing system. Background technique [0002] MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical system) technology has been developed rapidly in recent years. MEMS micro-devices have the advantages of small size, light weight, high integration, long service life, and easy mass production, making them widely used. Widely used in military and civilian fields. With the continuous maturity of MEMS technology, more and more sensors and actuators are manufactured by MEMS technology. MEMS fluxgate magnetometer is a miniature magnetometer manufactured by MEMS technology. The processing of the MEMS fluxgate magnetometer involves MEMS processes such as photolithography, electroplating, sputtering, and etching. There are dozens of processes before and after, and any unqualified process will affect the per...
Claims
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Inventor 杨建中刘幂尤政李滨阮勇
Owner TSINGHUA UNIV