Method of monolithically integrated optoelectrics
An optoelectronic component, integrated technology, applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve problems such as increased packaging costs
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[0025] refer to figure 1 , shows the integrated sensor array and CMOS ASIC1, and important functional areas: CMOS circuit 4, C-sip-i-n photodiode 5, a-SIp-i-n photodiode 6 and III-V emitter 7. The silicon sensor chip is covered by a SiO2 cover glass 3 which is patterned to provide suitable clearance for the device elements bonded to the silicon substrate.
[0026] exist figure 2A cross-section of the completed sensor and circuit array is shown in . The cross-section shows the aforementioned device element gaps 10 patterned into the cover glass 3 and the interface 9 of the cover glass 3 bonded to the silicon-based sensor array 1 . The cover glass is patterned to provide the bonding pads on the silicon sensor chip with clear-outs 11 to facilitate proper connection to external circuitry, the gaps 11 being physically created during the wafer dicing process on which During the dicing process, the chips are severed and removed from the bonded wafer assembly.
[0027] In one or ...
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