A kind of magnetron sputtering to prepare lithium battery electrode material fese 2 thin film method

A magnetron sputtering and electrode material technology, applied in sputtering plating, metal material coating process, ion implantation plating and other directions, can solve the problems of difficult to prepare large-area thin films, expensive preparation equipment, large energy consumption, etc. Achieve the effects of high magnetron sputtering efficiency, good repeatability and low preparation cost

Inactive Publication Date: 2018-01-23
SOUTHWEST JIAOTONG UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

This method has the following disadvantages: 1) the laser focus range is small, and it is difficult to prepare large-area thin films; 2) the laser energy is very high and the air is easily ionized, so the vacuum degree in the preparation process is very high; The requirements of the laser are very high, resulting in expensive preparation equipment and high cost; 4) This method needs to use a laser, which consumes a lot of energy and further increases the cost

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  • A kind of magnetron sputtering to prepare lithium battery electrode material fese <sub>2</sub> thin film method
  • A kind of magnetron sputtering to prepare lithium battery electrode material fese <sub>2</sub> thin film method

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Embodiment 1

[0028] Preparation of lithium battery electrode material FeSe by magnetron sputtering 2 A thin film method comprising the steps of:

[0029] a, sputtering preparation: select the silicon substrate as the substrate for magnetron sputtering, select the FeSe target material with a purity of 99.99% as the sputtering target material for magnetron sputtering, clean the silicon substrate; The silicon substrate and the FeSe target are installed at corresponding positions in the magnetron sputtering chamber, and the distance from the FeSe target to the silicon substrate is adjusted to 7cm;

[0030] b. Sputtering deposition: evacuate the vacuum chamber to a pressure less than 2×10 -4 Pa, then feed argon with a purity of 99.995% as the working gas, adjust the sputtering pressure to 0.5Pa, the substrate temperature to 600°C, the sputtering power to 60W, and deposit a thin film on the silicon substrate after 0.5h of sputtering;

[0031] c. Post-annealing treatment: the silicon substrate ...

Embodiment 2

[0037] Preparation of lithium battery electrode material FeSe by magnetron sputtering 2 A thin film method comprising the steps of:

[0038] a, sputtering preparation: select the silicon substrate as the substrate for magnetron sputtering, select the FeSe target material with a purity of 99.99% as the sputtering target material for magnetron sputtering, clean the silicon substrate; The silicon substrate and the FeSe target are installed at corresponding positions in the magnetron sputtering chamber, and the distance from the FeSe target to the silicon substrate is adjusted to 5cm;

[0039] b. Sputtering deposition: evacuate the vacuum chamber to a pressure less than 2×10 -4Pa, then feed argon gas with a purity of 99.995% as the working gas, adjust the sputtering pressure to 0.45Pa, the substrate temperature to 500°C, the sputtering power to 80W, and deposit a thin film on the silicon substrate after 1h of sputtering;

[0040] c. Post-annealing treatment: the silicon substrat...

Embodiment 3

[0044] Preparation of lithium battery electrode material FeSe by magnetron sputtering 2 A thin film method comprising the steps of:

[0045] a, sputtering preparation: select the silicon substrate as the substrate for magnetron sputtering, select the FeSe target material with a purity of 99.99% as the sputtering target material for magnetron sputtering, clean the silicon substrate; The silicon substrate and the FeSe target are installed at corresponding positions in the magnetron sputtering chamber, and the distance from the FeSe target to the silicon substrate is adjusted to 6cm;

[0046] b. Sputtering deposition: evacuate the vacuum chamber to a pressure less than 2×10 -4 Pa, then feed argon gas with a purity of 99.995% as the working gas, adjust the sputtering pressure to 0.55Pa, the substrate temperature to 400°C, the sputtering power to 70W, and deposit a thin film on the silicon substrate after 0.7h of sputtering;

[0047] c. Post-annealing treatment: the silicon subst...

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Abstract

Preparation of lithium battery electrode material FeSe by magnetron sputtering 2 The method for thin film, its step is: a, sputtering preparation: choose silicon substrate as substrate, FeSe target material as sputtering target material, be installed in magnetron sputtering chamber, adjust the distance of sputtering target material to substrate as 5‑7cm; b. Sputtering deposition: evacuate the vacuum chamber until the pressure is less than 2×10 ‑ 4 Pa, then feed argon gas, adjust the sputtering pressure, sputtering power, and substrate temperature, and deposit a thin film on the silicon substrate after sputtering for a certain period of time; The balls are sealed together with an air pressure less than 1×10 ‑2 In a vacuum quartz tube of Pa, then place the quartz tube in a tube furnace and perform post-annealing treatment under the protection of argon to obtain FeSe 2 film. This method can prepare FeSe with large area and good performance 2 The thin film has simple preparation process, low energy consumption, low cost, high efficiency and good repeatability, and is suitable for industrial production.

Description

technical field [0001] The invention relates to a preparation of lithium battery electrode material FeSe 2 Thin film method, especially related to magnetron sputtering method to prepare lithium battery electrode material FeSe 2 thin film method. Background technique [0002] As a new type of green power supply, lithium battery has high volume and mass specific energy, high average output voltage, large current discharge, small self-discharge rate, long discharge time, high charging efficiency, wide operating temperature range, less pollution, residual capacity test Convenience and other advantages. In addition, according to the requirements of different electrical devices for power output performance, lithium-ion batteries can choose appropriate positive electrode materials, negative electrode materials, electrolytes and assembly processes for corresponding power supply performance design and appearance size design. Superiority and designability are based on the propertie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/58
Inventor 羊新胜金荣蒲小艳赵勇魏占涛张敏
Owner SOUTHWEST JIAOTONG UNIV
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