Method for measuring vibration using interferometry

Abstract

The present invention relates to a method for measuring vibration using an interferometer. The method of the present invention comprises: a step for acquiring an image; a step for calculating the movement width; a step for calculating the amplitude; and a step for calculating the cycle. The step for acquiring consecutive image requires an image of the subject to be measured at a certain time interval for the subject to be measured which vibrates with a certain cycle. The step for calculating the movement width calculates the movement width to the left and the right of a moire pattern in the plurality of images acquired. The step for calculating the amplitude calculates the amplitude of the subject to be measured by using the distance between neighboring patterns of the moire pattern, the wavelength of the light irradiated to the subject to be measured, and the movement width to the left and the right of the moire pattern. The step for calculating a cycle calculates the cycle of the subject to be measured by using the time spent by the moire pattern leaving the initial position and returning to the initial position within the movement width to the left and the right of the moire pattern.

Description

technical field [0001] The present invention relates to a method of measuring oscillation using interferometry, and more particularly to a method of measuring oscillation using interferometry in which a property affecting the oscillation of an object is measured using an interferometer. Background technique [0002] An interferometer refers to an instrument that, after emitting light onto the surface of an object to be measured and a reference surface, generates interference fringes caused by reflected or transmitted two beams of light, and measures and analyzes the resulting The above interference fringes are used to obtain information about the surface shape of the object. [0003] Since such an interferometer is easy to measure the shape of an object, it has been widely used in industrial fields. Rapid technological advances throughout industry have recently introduced micromachining into semiconductors, microelectromechanical systems (MEMS), flat panel displays, optical...

AI Technical Summary

Problems solved by technology

[0006] In this way, an interferometer for measuring the shape of an object includes a separate oscillatory measurer, and therefore, the entire system has a complex structure

In addition, since the measured oscillation data output from the oscillation measuring device is incompatible with the measured shape data output from the interferometer, the throughput of the system as a whole increases, so the load on the entire system also increases

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