Breaking method and breaking device for plate of brittle material

Abstract

The method of breaking a plate made of brittle material is to first form a tiny starting scratch (16) on the first main surface (1a) of the plate (1) on the planned breaking line (2), and then press it on the pair of lines. The first main surface (1a) of the plate (1). Then, for example, the dividing member (11) for contact heating the second main surface (1b) of the plate material (1) comes into contact with the second main surface (1b) of the plate material (1), causing the first main surface (1a) to be Tensile thermal stress, and a bending force in the plate thickness direction is applied to the second main surface (1b) of the plate material (1), so that the tensile stress caused by the bending force and the tensile thermal stress are superimposed. Thereby, the plate (1) is divided along the planned dividing line (2).

Description

technical field [0001] The invention of the present application relates to a breaking method and a breaking device for breaking a plate made of a brittle material. Background technique [0002] In recent years, sheets made of brittle materials such as glass sheets and semiconductor substrates (hereinafter simply referred to as "sheets") are widely used in FPD (flat panel display), building materials, and automobile industries. There is also a sheet material whose thickness becomes extremely thin for the purpose of weight reduction or the like (for example, 1 mm or less, and in recent years, about 0.3 mm). [0003] Such boards can be cut into desired sizes according to the purpose of use. As a common breaking method, for example, for a glass plate (hereinafter, "glass plate" will be described as an example of a plate material), there is the following method: use a mechanical cutting machine (diamond cutting machine, super hard cutting machine) along the planned breaking line...

AI Technical Summary

Problems solved by technology

[0004] Moreover, the edge that has been divided along the scribed groove will have a small defect due to the mechanical cutter, which will reduce the strength. Therefore, it is necessary to grind and grind the edge.

In addition, in order to improve productivity, a scribing device for forming scribe grooves and a breaking device for cutting are required, resulting in an increase in cost

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