Boss coil for preparing zone melting single-crystal

Abstract

The invention provides a boss coil for preparing a zone melting single-crystal, which comprises a coil, a cooling water pipe and a blowing gas path, wherein the cooling water pipe is embedded into a framework of the coil; the coil is of a circular ring-shaped structure of which the center is provided with coil holes; an annular step which sinks to the inside of the coil is arranged on the upper surface of the coil; a plane is formed on the step and is provided with an annular boss; one end of the bottom of the step is connected with the upper edge of the inner circle of the coil to form an inclined plane which inclines downward; the lower surface of the coil is an inclined plane which inclines above the center of the coil; and the blowing gas path horizontally penetrates through the lower part of the coil from the outer side and penetrates out of the lower surface of the coil. The boss coil provided by the invention can provide a stable and uniform growth thermal field to ensure that molten silicon descends smoothly, the crystal forming rate and equipment moving rate are high, and the conditions of edge thorns, melting zone solidification, melting zone out-of-waistband and the like are avoided.

Description

technical field [0001] The invention belongs to the field of zone-melting silicon single crystals, in particular to a boss coil for preparing zone-melting single crystals. Background technique [0002] The thermal field and the stability of single crystal growth during the growth process of zone melting silicon single crystal are very important. During the single crystal preparation process, it is easy to have thorns on the edge of the polysilicon material, solidification of the melting zone, and belt out of the melting zone, etc., which will interrupt the single crystal preparation process and reduce the production efficiency of the equipment. Therefore, a stable and uniform growth thermal field is very important for the preparation of zone melting single crystal silicon. The core component of the thermal field is the heating coil. When the conventional slope coil is used with large-diameter polycrystalline materials, it is easy to cause molten silicon to go down smoothly ...

AI Technical Summary

Problems solved by technology

The core component of the thermal field is the heating coil. When the conventional slope coil is used with large-diameter polycrystalline materials, it is easy to cause the molten silicon to go down smoothly and burr, which affects the crystal formation rate and equipment utilization rate.

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