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A micro-nano manipulation device

An operating device, micro-nano technology, applied in the directions of manipulators, program-controlled manipulators, manufacturing tools, etc., can solve the problems of large movement range, complex structure, large movement scale, etc., to solve the problems of convenient operation, simple device structure and high precision Effect

Inactive Publication Date: 2017-04-05
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The early piezoelectric ceramic drive has a complex drive structure, large size, large motion scale, and large drift. Now the piezoelectric ceramic linear motor is small in size, high in precision, and large in motion range. Therefore, nano manipulators driven by piezoelectric ceramic motors are The most convenient way to achieve nanomanipulation

Method used

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  • A micro-nano manipulation device

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Experimental program
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Effect test

Embodiment 1

[0023] Fix the micro-nano manipulation device on the sample substrate of the optical microscope with bolts through the fixing part 13, wherein the first connecting part 2, the second connecting part 4, the third connecting part 7, the fourth connecting part 10 and the fixing part 13 are selected Made of stainless steel. Turn on the power, and manually control one or more of the X-direction piezoelectric ceramic linear motor controller 16, the Z-direction piezoelectric ceramic linear motor controller 15, and the Y-direction piezoelectric ceramic rotary motor controller 14 to realize the X-direction piezoelectric ceramic One or more of the linear motor movement rod 5, the Z-direction piezoelectric ceramic linear motor movement rod 8 and the Y-direction piezoelectric ceramic rotary motor turntable 11 move to realize the three directions of the manipulator 1 in the X direction, Y direction and Z direction. Single or simultaneous stepping movement with degrees of freedom, wherein t...

Embodiment 2

[0026] Fix the micro-nano manipulation device on the sample stand of the scanning electron microscope with bolts through the fixing part 13, wherein the first connecting part 2, the second connecting part 4, the third connecting part 7, the fourth connecting part 10 and the fixing part 13 Titanium or titanium alloy material is preferred. Turn on the power supply, and precisely control one or more of the X-direction piezoelectric ceramic linear motor controller 16, the Z-direction piezoelectric ceramic linear motor controller 15, and the Y-direction piezoelectric ceramic rotary motor controller 14 through the computer control system 21 to realize One or more of the X-direction piezoelectric ceramic linear motor movement rod 5, the Z-direction piezoelectric ceramic linear motor movement rod 8, or the Y-direction piezoelectric ceramic rotary motor turntable 11 moves to realize the X-direction and Y-direction of the manipulator 1. Single or simultaneous precise stepping movement w...

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Abstract

The invention belongs to the technical field of micro / nano operating devices and particularly relates to a micro / nano operating device which is small in size, high in accuracy and large in motion range. According to the device, through combination of an X-direction piezoelectric ceramic linear motor, a Z-direction piezoelectric ceramic linear motor and a Y-direction piezoelectric ceramic rotary motor, micro / nano operation at the nano-scale accuracy within the large range from nano-scale to centimeter-scale can be achieved, independent or simultaneous three-freedom-of-degree control is achieved, accuracy is high, and the problems that a micro / nano operating device is small in operating range and single in adaptability are solved; the device can be used for precise operation of electron microscopes, optical microscopes and the like, and micro / nano operation such as alignment, injection, electric signal application and cutting is conducted; and the device is simple in structure and small in size.

Description

technical field [0001] The invention belongs to the technical field of micro-nano operating devices, and in particular relates to a micro-nano operating device with small volume, high precision, large motion range and wide applicability. Background technique [0002] The surface morphology of materials can be observed by optical microscope or electron microscope, and its resolution can reach micron and nanometer level. While studying the surface morphology of materials, in recent years, material researchers have paid more and more attention to the observed micro-nano materials, using micro-manipulators for manipulation and testing and research of mechanical and electrical properties. [0003] There are only a few products of micro-manipulation devices for scanning electron microscopes in the international market, companies such as KleindickKanorochnik, Klocke Nanotechnik, Omiprobe and Zyvex, whose step size reaches the nanometer level; there are also researches in China, suc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/08B25J9/12B25J13/00
Inventor 闫允杰
Owner TSINGHUA UNIV
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