A z-axis positioning method for aspheric surface measurement based on the minimum pv value
A positioning method and aspheric surface technology, applied to measuring devices, instruments, optical devices, etc., can solve the problems of surface shape errors, large errors, and difficulty in accurately locating cat's eyes
Inactive Publication Date: 2018-04-17
XI AN JIAOTONG UNIV
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[0004] The traditional positioning method is to find the position of the cat's eye by observing the interference fringes, that is, the position of the exit point of the reference light, and then move the aspheric surface to the measurement position by referring to the cat's eye position. Although the precision guide rail can ensure that the aspheric surface moves along the optical axis, only by observing Interference fringes are difficult to accurately locate the cat's eye, the error is relatively large, and it will also be affected by the surface error of the aspheric surface to be tested
For low-precision aspheric measurement, traditional positioning methods can meet the measurement and positioning requirements, but for aspheric detection with high-precision requirements, this method can only be used as an auxiliary means in the rough positioning stage
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[0035] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0036] refer to figure 1 , a Z-axis positioning method for aspheric surface measurement based on the minimum PV value, comprising the following steps:
[0037] 1) Calculate the best reference spherical wave radius R corresponding to the minimum PV value according to the aspheric surface parameters ZC , the best reference spherical wave vertex deviation Δ ZC , get the theoretical measurement position S=R corresponding to the minimum PV value ZC +Δ ZC ;
[0038] The specific calculation process is as follows:
[0039] refer to figure 2 , in the aspheric surface measurement process, the deviation δ of a certain point on the aspheric surface relative to the reference spherical wave is defined as the surface shape value at this point on the aspheric surface, and the PV value of the aspheric surface shape is the maximum deviation δ max and the minimum deviation δ ...
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A Z-axis positioning method for aspheric surface measurement based on the minimum PV value. According to the aspheric surface parameters, the optimal reference spherical wave radius and the optimal reference spherical wave vertex deviation corresponding to the minimum PV value are calculated, and the theoretical measurement position corresponding to the minimum PV value is obtained. ; Then find the position of the cat's eye through the interference fringe, take the measured position of the cat's eye as the zero position of the Z-axis, move the aspheric surface along the Z-axis to the theoretical measurement position through the precision guide rail, and obtain the initial positioning position of the Z-axis, and then perform a preliminary positioning on the Z-axis Within the range of ±0.5mm of the position, move the aspheric surface back and forth along the Z axis, and use the interferometer to perform multiple measurements until the minimum PV value at the micron resolution of the Z axis is obtained, and record the actual measurement of the Z axis corresponding to the minimum PV value at this time Position: calculate the difference between the measured position corresponding to the minimum PV value and the theoretically measured position, and complete Z-axis high-precision positioning during aspheric surface measurement. The present invention realizes Z-axis high-precision positioning during aspheric surface measurement.
Description
technical field [0001] The invention belongs to the technical field of aspherical surface optical detection, and in particular relates to a Z-axis positioning method for aspheric surface measurement based on the minimum PV value. Background technique [0002] Aspherical optical components have the advantages of correcting aberrations, improving image quality, expanding the field of view and increasing the working distance, and at the same time can reduce the weight of the system and reduce the occupied space. Therefore, aspheric components are being used more and more in space Optics, military defense, high-tech civilian and other fields. With the rapid development of these application fields, the requirements for the accuracy of aspheric surfaces are getting higher and higher, and higher-precision aspheric surface detection methods are required to ensure high-precision manufacturing of aspheric surfaces. [0003] At present, the high-precision detection methods of aspheric...
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IPC IPC(8): G01B11/25
Inventor 李兵刘晓康晓清高芬王曰根
Owner XI AN JIAOTONG UNIV