Method and device for measuring surface shape of large-diameter concave mirror based on color dual-frequency fringe reflection
A fringe reflection and measurement method technology, applied in the field of optical detection, can solve the problems of inapplicability, achieve the effect of no central occlusion, large dynamic range, and avoid color crosstalk
Active Publication Date: 2018-03-09
SUZHOU UNIV
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Embodiment 1
[0025] See attached figure 1 , which is a structural schematic diagram of a large-aperture concave (like) mirror surface shape measurement device based on color dual-frequency fringe reflection provided in this embodiment. The measuring device is composed of a display screen 1 , a light combining device 2 , a beam splitter 3 , a color camera 5 , a data transmission control connection line 6 and a computer 7 . The two display screens 1 are respectively located on the two end faces of the light combining device 2; the structure composed of the display screen 1 and the light combining device 2, and the color camera 5 cooperate with the beam splitter 3 respectively to form a common optical path structure, so that the display screen 2 and the color camera 5 are all located at the focal plane position of the large-diameter concave (class) mirror 4 to be measured, and the camera 5 is focused on the mirror 4 to be measured; the computer 7 utilizes the software developed based on the V...
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The invention discloses a method and a device for measuring the surface shape of a large-diameter concave mirror based on color double-frequency fringe reflection. According to the fringe image coding method, the computer generates red and blue dual-frequency fringe images by coding along two orthogonal directions, and transmits them to two display screens for synchronous display. reflector to the mirror surface to be tested; the target deformed fringe pattern reflected by the specular surface to be measured is received by the color camera and transmitted to the computer after passing through the beam splitter, and the absolute phase distribution corresponding to the surface shape of the specular surface to be measured is obtained after demodulation processing; combined with The phase consistency constraints and the calibrated system structure parameters are used to obtain the gradient distribution of the surface shape of the mirror surface to be measured in two orthogonal directions, and the three-dimensional surface shape distribution of the mirror surface to be measured is obtained through integral reconstruction. The measuring device provided by the invention has a simple and compact system structure, no central obstruction, and can realize rapid and accurate measurement of the three-dimensional surface shape of a large-caliber concave mirror object with complex surface changes.
Description
technical field [0001] The invention relates to a measurement technology for the surface shape of a large-diameter concave mirror, in particular to a measurement method and device based on color dual-frequency fringe reflection, belonging to the technical field of optical detection. Background technique [0002] As the core component of astronomical telescopes, the surface shape accuracy of large-aperture optical mirrors directly affects the working performance of the telescope, so the detection accuracy often determines the quality of the processing and molding effect. In traditional astronomical telescopes, the optical mirrors are mostly flat, spherical or quadric. With the rapid development of optical components, especially large-aperture optical mirror processing technology, a variety of aspheric / free-form components with complex shapes have been applied in astronomical telescopes. These components can significantly improve the performance of the telescope while reducin...
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IPC IPC(8): G01B11/25
Inventor 马锁冬李博
Owner SUZHOU UNIV