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Humidity sensor and manufacturing method

A technology of humidity sensor and manufacturing method, applied in material capacitance and other directions, can solve problems such as slow response speed, and achieve the effect of shortening the path, increasing the contact area, and improving the response speed

Active Publication Date: 2015-12-23
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The purpose of the present invention is to overcome the above-mentioned defects in the prior art, and provide a humidity sensor and a manufacturing method to solve the problem of slow response speed of the existing humidity sensor and improve the performance of the humidity sensor

Method used

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  • Humidity sensor and manufacturing method

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Embodiment Construction

[0031] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0032] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0033] In the following specific embodiments of the present invention, please refer to figure 2 , figure 2 It is a structural schematic diagram of a humidity sensor in a preferred embodiment of the present invention. Such as figure 2 As shown, a kind of humidity sensor of the present invention comprises wafer substrate 301, dielectric layer 302...

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Abstract

The invention discloses a humidity sensor and a manufacturing method. An open cavity is formed under interdigital electrodes of the humidity sensor, so that the bottom of a humidity-sensitive material layer can be communicated with the outside environment, the contact area of humidity-sensitive materials and the outside environment can be increased, and the water molecule motion path can be shortened. Therefore, the response speed of the humidity sensor can be effectively increased, and the properties of the humidity sensor can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing and manufacturing, and more specifically, to a humidity sensor and a manufacturing method. Background technique [0002] Humidity, usually refers to the content of water vapor in the air, used to reflect the dryness and humidity of the atmosphere. Human daily life, industrial and agricultural production activities, and the survival and growth of animals and plants are all closely related to the humidity of the surrounding environment. The humidity sensor is used to measure humidity. It is based on the characteristics of humidity-sensitive functional materials that can produce physical effects or chemical reactions related to humidity. It realizes the measurement function by converting the physical quantity of humidity into an electrical signal. [0003] Humidity sensors can be divided into telescopic type, evaporative type, dew point meter, electronic type, electromagnetic type, ...

Claims

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Application Information

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IPC IPC(8): G01N27/22
Inventor 左青云康晓旭李铭
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT