Production and testing system and method for micro display chip
A production inspection and micro display technology, applied in photometry, measuring device, optical radiation measurement, etc., can solve the problems of inability to meet industrialization requirements, low efficiency, high inspection cost, and achieve the effect of high-speed online inspection for industrialization
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Embodiment 1
[0060] In the above, the silicon wafer fixing mechanism also includes a manual rotation device and an automatic rotation device; the chuck is arranged on the manual rotation device and the automatic rotation device, and a vacuum adsorption hole and at least one circle of vacuum adsorption are arranged on the surface of the chuck. ring.
[0061] Thus, the chuck of the silicon wafer fixing mechanism can be rotated at a large angle under the manual rotation device (usually realizes manual 360-degree rotation), while under the automatic rotation device, it can realize fine adjustment in a small size (such as automatic automatic rotation) ±15°). Combined with a large number of experiments, the application effect is the best when the adjustment accuracy of the automatic rotation device is 0.01°, the leakage current is less than 100fA, and the flatness error of the chuck is less than 1.5um.
[0062] The vacuum adsorption hole and the vacuum adsorption ring provided on the surface of...
Embodiment 2
[0064] In the above, the probe base further includes a magnetic switch base and a tilt adjustment frame; the probe is arranged on the magnetic switch base and the tilt adjustment frame.
[0065] In this embodiment, the probe base is equipped with a magnetic switch base so that it can move linearly and without recoil, and the tilt adjustment frame can ensure the adjustment of the probe angle. Combined with a large number of experiments, it is found that when the probe interface is connected to the cable at 45 degrees, the movement stroke in the X-Y-Z direction is 15mm, and the precision is 0.5 microns, the production detection effect of the present invention is the best.
Embodiment 3
[0067] In the above, the servo platform is provided with a color brightness meter, an industrial camera and an alignment microscope in sequence from left to right;
[0068] During detection, through the lateral movement of the servo platform, the alignment microscope, industrial camera and color brightness meter are aligned with the energized light-emitting display chip on the silicon wafer fixing mechanism in sequence for corresponding detection.
[0069] In this embodiment, since the color luminance meter, industrial camera, and alignment microscope are installed sequentially from left to right on the servo platform, the lens centers of the color luminance meter, industrial camera, and alignment microscope can be aligned by the lateral movement of the servo platform. A quasi-electroluminescent display chip. Combined with a large number of experiments, it was found that the servo platform adopts Panasonic MSMD series motors with brakes, which can fully adapt to the high-speed...
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