Detection device, substrate rack, and method for detecting substrate positions on substrate rack
A detection device and a technology for detecting substrates, which are applied to the detection of substrate positions on substrate racks, detection devices, and substrate racks, can solve problems such as low efficiency, large errors, and high error rates, and achieve high efficiency, small errors, and low error rates. Effect
Active Publication Date: 2015-12-23
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] The present invention aims at the problems of low efficiency, large error, high error rate and untimely detection of the existing method for detecting the position of the substrate on the substrate rack, and provides a detection device, a substrate rack, and a detection substrate that can accurately obtain the position of the substrate on the substrate rack at any time. How to position the substrate on the shelf
Method used
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Embodiment 1
[0033] Such as Figure 2 to Figure 7 As shown, this embodiment provides a detection device 2, which is used to detect the position of the substrate 9 carried on the substrate rack 1; the substrate rack 1 includes a plurality of bearing positions 11, and each bearing position 11 is used to carry a substrate 9 .
[0034] And detection device 2 specifically comprises:
[0035] Connect the emitter 21 of the signal source 211, which is used to be arranged at the edge of the bearing position 11, and is located on one side of the upper and lower sides of the substrate 9 carried by the bearing position 11;
[0036] At least one receiving electrode 22 connected to the detector 221 is arranged opposite to the emitting electrode 21 and located on the other side of the upper and lower sides of the substrate 9 carried by the carrying position 11 .
[0037] That is, if Figure 2 to Figure 4 As shown, the detection device 2 includes an emitter 21 and a receiver 22 arranged oppositely, and...
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The invention provides a detection device, a substrate rack, and a method for detecting substrate positions on the substrate rack, belongs to the technical field of substrate storage, and aims at solving the problems that an existing method for detecting the substrate positions on the substrate rack is low in efficiency, large in error, high in error rate and not timely. The detection device provided by the invention is used for detecting the positions of substrates carried on the substrate rack. The substrate rack comprises a plurality of carrying positions; each carrying position is used for carrying one substrate; the detection device comprises emitter electrodes and at least one receiver electrode; the emitter electrodes are connected with signal sources; each emitter electrode is arranged on the edge of the corresponding carrying position and is located on one side of the upper side and lower side of the substrate carried on the corresponding carrying position; each receiver electrode is connected with a detector, is arranged oppositely to the corresponding emitter electrode, and is located on the other side of the upper side and lower side of the substrate carried on the corresponding bearing position.
Description
technical field [0001] The invention belongs to the technical field of substrate storage, and in particular relates to a detection device, a substrate rack, and a method for detecting the position of a substrate on the substrate rack. Background technique [0002] The preparation process of array substrates and color filter substrates of display devices (such as liquid crystal display devices and organic light-emitting diode display devices) includes many different processes. Between each process, in order to store and transport the substrates, it is necessary cassette) on the substrate holder. Substrate frame structure such as figure 1 As shown, it is a multi-layer shelf, and each layer has a bearing position for carrying a substrate, and the substrate can be picked and placed by a robot. [0003] Due to the accumulation of operating errors of the manipulator, there will be a positional deviation when placing the substrate on the substrate rack, and the positional deviati...
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IPC IPC(8): G09G3/00G02F1/13
CPCG01D5/2403G01D5/20
Inventor 李国栋魏振郭世波孙纬伟蒋晨晨赵琼
Owner BOE TECH GRP CO LTD