A two-dimensional fast deflection device with low thickness and two-stage amplification and its deflection method

Abstract

A two-dimensional fast deflection device and deflection method with low thickness and two-stage amplification, the device includes a first drive mechanism and a third drive mechanism for the X-axis in the XOZ plane; a second drive mechanism for the Y-axis in the YOZ plane mechanism and the fourth driving mechanism; each driving mechanism is composed of a bridge-type displacement amplification mechanism based on a piezoelectric stack and an L-shaped lever displacement amplification mechanism based on a lever principle; when the piezoelectricity of the two driving mechanisms in the XOZ or YOZ plane Under the action of the differential drive signal, the displacement is generated based on the inverse piezoelectric effect. The first-stage displacement amplification in the plane and the second-stage displacement amplification of the L-shaped lever displacement amplification mechanism are performed through the bridge-type displacement amplification mechanism. The L-shaped lever The end of the type displacement amplification mechanism, that is, the long side end, will produce a large displacement; thus, the lens support block is driven to deflect through the flexible hinge, and the output of the two-dimensional angle is realized; the present invention has the advantages of small size, especially low thickness, light weight, low power consumption Low temperature, less heat generation and high precision.

Description

technical field

[0001] The invention belongs to the technical field of light beam control, and in particular relates to a two-dimensional fast deflection reflection device with low thickness and two-stage amplification and a deflection method thereof. Background technique

[0002] With the rapid development of microelectronics technology, bioengineering, aerospace engineering and other disciplines, two-dimensional fast deflecting mirrors have been widely used in military target scanning detection, tracking, aiming, astronomical telescopes, image stabilization, and precise pointing of spacecraft and laser communication. application and is playing an increasingly important role. Piezoelectric actuators have the characteristics of small size, light weight, low power consumption, large output force, and low heat generation. The flexible hinge has the characteristics of compact structure, no mechanical friction, and high transmission precision. However, the direct drive system ...

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