Segmented silicon carbide liner

Abstract

Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.

Description

technical field [0001] The present disclosure relates to silicon carbide materials, bonding materials, and joint designs for making segmented silicon carbide liners for use in fluidized bed reactors for making polysilicon-coated granular materials. Background technique [0002] Pyrolytic decomposition of silicon-containing gases in fluidized beds is an attractive method for the production of polysilicon for use in the photovoltaic and semiconductor industries due to excellent mass and heat transfer, increased deposition surface and continuous production. Compared to Siemens type reactors, fluidized bed reactors offer significantly higher production rates at a fraction of the energy expenditure. Fluidized bed reactors can be highly automated to significantly reduce labor costs. [0003] Manufacture of granular polysilicon in a fluidized bed reactor by chemical vapor deposition involving pyrolysis of silicon-containing species such as monosilane, disilane or halosilanes such ...

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Problems solved by technology

[0005] A common problem in fluidized bed reactors is that at high operating temperatures, silicon-coated particles in the fluidized bed are contaminated by materials used to construct the reactor and its components

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