Temperature measurement method and system for correcting dual-wave-band temperature measurement error

A dual-band temperature measurement and temperature measurement technology, which is applied to measuring devices, optical radiation measurement, radiation pyrometry, etc., can solve problems such as measurement errors

Active Publication Date: 2016-02-17
ADVANCED MICRO FAB EQUIP INC CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0018] The purpose of the present invention is to provide a more accurate temperature measurement method and system to overcome the

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  • Temperature measurement method and system for correcting dual-wave-band temperature measurement error
  • Temperature measurement method and system for correcting dual-wave-band temperature measurement error
  • Temperature measurement method and system for correcting dual-wave-band temperature measurement error

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Embodiment Construction

[0060] In the present invention, temperature measurement is carried out based on the principle of dual-band temperature measurement, involving the following formula:

[0061] P 1 = c 1 ϵ 1 λ 1 5 [ exp ( c 2 λ 1 T ) - 1 ] = c 1 λ 1 5 [ ...

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Abstract

The invention provides a temperature measurement method and system for correcting a dual-wave-band temperature measurement error. At a correction stage, radiation energy and temperatures of a reference object at two different wavelengths are measured by using a thermodetector for dual-wave-band temperature measurement, and a formula expressing a relation between a logarithm of an emissivity ratio and l/Tdual is solved by fitting; and at a measurement stage, radiation energy and temperatures of a measured object at two wavelengths are measured by using a thermodetector for dual-wave-band temperature measurement, and an actual temperature of the measured object is calculated based on the calculated l/Tdual value and the formula obtained at the correction stage. Because the Tdual value is calculated based on the ratio value of the radiation energy and is not affected by the dielectric interference of the measurement path, the dual-wave-band temperature measurement error can be corrected effectively and the measurement result becomes accurate.

Description

technical field [0001] The invention relates to the field of temperature measurement, in particular to a temperature measurement method and system for correcting dual-band temperature measurement errors. Background technique [0002] The non-contact radiation temperature measurement method based on the Plank principle determines the surface temperature of the object by measuring the radiation energy of the object itself. The amount of radiation of an object is not only dependent on the radiation wavelength and the temperature of the object, but also related to the type of material constituting the object, the surface state and other factors. Generally, the emissivity or spectral emissivity is used to characterize the infrared radiation characteristics of the object. The emissivity of real objects varies with temperature. Such as figure 1 As shown, the radiant energy of the measured object enters the infrared radiation thermometer through the quartz window, and is focused i...

Claims

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Application Information

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IPC IPC(8): G01J5/52
Inventor 泷口治久
Owner ADVANCED MICRO FAB EQUIP INC CHINA
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