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Cathode arc evaporation source target base

A cathode arc evaporation and target seat technology, which is applied in the field of arc evaporation sources, can solve the problems of inconvenient installation and disassembly, waste of target materials, etc., and achieve the effects of improving production efficiency, saving coating materials, and improving heat conduction

Inactive Publication Date: 2016-03-02
YICHANG HOUHUANG VACUUM TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the target is directly installed on the cathode arc evaporation source, which is not only inconvenient to install and disassemble, but also causes waste of the target

Method used

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  • Cathode arc evaporation source target base
  • Cathode arc evaporation source target base
  • Cathode arc evaporation source target base

Examples

Experimental program
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Embodiment Construction

[0014] Below in conjunction with accompanying drawing and embodiment the present invention is further described:

[0015] Such as figure 1 , figure 2 As shown, a cathodic arc evaporation source target base includes a target base 1 made of copper, a cavity 4 is provided inside the target base 1, a central threaded hole 3 is provided in the center of the upper surface of the target base 1, and the upper surface of the target base 1 is The thickness is not more than 1CM; the lower end of the side surface of the target base 1 is provided with a notch 6, and the thread 2 is provided at the bottom of the notch 6.

[0016] Such as image 3 Among them, a cathodic arc evaporation source target base includes a target base 1 made of copper, a cavity 4 is provided inside the target base 1, a central threaded hole 3 is provided in the center of the upper surface of the target base 1, and the thickness of the upper surface of the target base 1 is The inner cavity 4 of the target base 1 ...

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PUM

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Abstract

The invention belongs to the technical field of arc evaporation sources, and particularly relates to a cathode arc evaporation source target base facilitating mounting and dismounting of target materials. The cathode arc evaporation source target base comprises a target base made of copper, a cavity is formed in the target base, a thread is arranged at the lower end of the side surface of the target base, and a center threaded hole is formed in the center of the upper surface of the target base. The cathode arc evaporation source target base has the beneficial effects that target materials with the small thickness can be used, target material mounting and dismounting are more convenient, and the cooling effect is good; and the production efficiency is greatly improved, coating materials are saved, and the production cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of arc evaporation sources, and in particular relates to a cathode arc evaporation source target seat which is convenient for installation and disassembly of targets. Background technique [0002] It is suitable for hard coatings of cutting tools, injection molds and wear-resistant parts of engines. One of the important preparation methods is multi-arc ion plating. Ion plating is a deposition technology that uses gas discharge to ionize gas and evaporating substances under vacuum conditions, and deposits evaporants or reactants on the substrate while the gas and evaporating ions are bombarded. Multi-arc ion plating technology is ion plating An improved method is to rely on the cathodic arc source to evaporate ions for deposition. It has strong practicability and has excellent characteristics such as high film formation rate, dense film layer, and strong film-base binding force. [0003] The cathodic arc eva...

Claims

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Application Information

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IPC IPC(8): C23C14/32
Inventor 闫少健韩滨付德春
Owner YICHANG HOUHUANG VACUUM TECH